Photonics Research, Volume. 6, Issue 7, 686(2018)
Athermal 4-channel (de-)multiplexer in silicon nitride fabricated at low temperature
Figures & Tables(9)
Fig. 1. Schematics of the athermal (a) MZI filter and (b) 4-channel MZI (de-)multiplexer.
Fig. 2. (a) Simulated effective index and TOC of the
Fig. 3. (a) Optical microscope image of the athermal 4-channel (de-)multiplexer. SEM images of (b) a
Fig. 4. Transmission spectra of MZI filters at different temperatures for (a)
Fig. 5. (a) Thermal sensitivity as a function of
Fig. 6. Measured normalized transmission spectra of (a) conventional MZI (de-)multiplexer and (b) athermal MZI (de-)multiplexer.
Fig. 7. Spectral shift with temperature for (a) Ch. 1, (b) Ch. 2, (c) Ch. 3, and (d) Ch. 4.
Table 1. Room-Temperature Performance of the Athermal MZI (De-)Multiplexer
View tableView in ArticleTable 1. Room-Temperature Performance of the Athermal MZI (De-)Multiplexer
Ch. 1 Ch. 2 Ch. 3 Ch. 4 Center wavelength (nm) 1293.6 1297.7 1301.9 1306.1 Crosstalk at center (dB) −30 −25 −22 −23 1-dB bandwidth (nm) 2.2 2.2 2.2 2.2 Insertion loss (dB) 5.5 5.2 5.5 5.5 Channel spacing (nm) 4.3 4.0 4.2
Table 2. Performance Comparison of the MZI Filters and (De-)Multiplexers with Low Thermal Sensitivity (MUX, multiplexer; IL, insertion loss; ET, extinction ratio for MZI filter; XT, crosstalk for MUX)
View tableView in ArticleTable 2. Performance Comparison of the MZI Filters and (De-)Multiplexers with Low Thermal Sensitivity (MUX, multiplexer; IL, insertion loss; ET, extinction ratio for MZI filter; XT, crosstalk for MUX)
Ref. Material Device (pm/°C) IL (dB) ET/XT (dB) Dwivedi et al. [22 ]Silicon MZI filter (in 40 nm) 0.3 −25 Yang et al. [24 ]Silicon MZI filter (in 30 nm) N.A. −30 Xing et al. [23 ]Silicon MZI filter (in 60 nm) 1 −10 Our device SiN (PECVD) MZI filter (in 55 nm) 2.6 −30 Hassan et al. [25 ]Silicon MZI MUX 4 (all channels) 4.3 −15 Gao et al. [30 ]SiN (LPCVD) MZI MUX 4 18.7 (central channel) 1.8 −20 Bucio et al. [36 ]SiN (PECVD) AMMI MUX 3 10 (central channel) 2.5 −18 Our device SiN (PECVD) MZI MUX 4 (all channels) 5.5 −22
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Shiqi Tao, Qingzhong Huang, Liangqiu Zhu, Jun Liu, Yinglu Zhang, Ying Huang, Yi Wang, Jinsong Xia, "Athermal 4-channel (de-)multiplexer in silicon nitride fabricated at low temperature," Photonics Res. 6, 686 (2018)
Paper Information
Category: Silicon Photonics
Received: Feb. 1, 2018
Accepted: Apr. 29, 2018
Published Online: Jul. 4, 2018
The Author Email: Qingzhong Huang (huangqz@mail.hust.edu.cn), Jinsong Xia (jsxia@hust.edu.cn)
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