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Opto-Electronic Engineering, Volume. 34, Issue 12, 38(2007)

Performance study of AZO/Ag/AZO transparent conductive multilayer prepared films by R.F magnetron sputtering

[in Chinese]1, [in Chinese]2, [in Chinese]2, [in Chinese]2, and [in Chinese]2
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  • 2[in Chinese]
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    [1] [1] Park S H,Kim H M,Rhee B R,et al.Effects of Oxygen Concentration on Characteristics of RF-Sputtered In2O3-ZnO Thin Films[J].Jpn.J.Appl.Phys,2001,40(3A):1429-1430.

    [2] [2] Leftheriotis G,Papaefthimiou S,Yianoulis P Development of multilayer transparent conductive coating[J].Solid State Ionics,2000,136/137:655-661.

    [3] [3] Ali H M,Mohamed H A,Mohamed S H.Enhancement of the optical and electrical properties of ITO thin films deposited by electron beam evaporation technique[J].Eur.Phys.J.Appl.Phys,2005,31:87-92.

    [4] [4] Kelly P J,Zhou Y,Postill A.A novel technique for the deposition of aluminum-doped zinc oxide films[J].Thin Solid Films,2003,426:111-115.

    [7] [7] Hupkes J,Rech B,Calnan S,et al.Material study on reactively sputtered zinc oxide for thin film silicon solar cells[J].Thin Solid Films,2006,502:286-291.

    [8] [8] Leftheriotis G,Apaefthimiou S,Yianoulis P.Integrated low-emit-tance-electrochromic devices in corporating ZnS/Ag/ZnS coatings as transparent conductors[J].Solar Energy Materials & Solar Cells,2000,61:107-112.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Performance study of AZO/Ag/AZO transparent conductive multilayer prepared films by R.F magnetron sputtering[J]. Opto-Electronic Engineering, 2007, 34(12): 38

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    Paper Information

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    Received: Feb. 4, 2007

    Accepted: --

    Published Online: Aug. 17, 2008

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology