Software Compensation Techniques for Accuracy Improvement in Alignment System Based on Digital Image

[1] [1] SIEGEL A C，BRUZEWICZ D A，WEIBEL D B，et al. Microsolidics: Fabrication of Three-dimensional Metallic Microstructures in Poly(dimethylsiloxane) [J]. Advanced Materials(S0935-9648)，2007，19: 727-733.

[2] [2] PARK S H，LIM T W，YANG D Y. Effective Fabrication of Three-dimensional Nano/microstructures in a Single Step Using Multilayered Stamp [J]. Applied Physics Letters(S0003-6951)，2006，88: 203105-1-3.

[6] [6] SMITH S M，BRADY J M. SUSAN- A New Approach to Low Level Image Processing [J]. International Journal of Computer Vision(S0920-5691)，1997，23(1): 45-78.

[9] [9] BRUBARKER C，WIEDER B，LINDNER. Thick Resist Alignment Technology for MEMS and Advanced Packaging [J]. Proceedings of SPIE(S0277-786X)，2003，5037: 1059-1065.

CLP Journals

[1] Zhou Zhisheng, Xiangli Bin, Zhang Wenxi, Li Yang. Image Reconstruction Method of Fourier Telescope Based on Iteration[J]. Acta Optica Sinica, 2014, 34(5): 511005

Tools

Get Citation

Copy Citation Text

WANG Quan-dai, XIAO Ji-ming, LI Peng-yang. Software Compensation Techniques for Accuracy Improvement in Alignment System Based on Digital Image[J]. Opto-Electronic Engineering, 2011, 38(9): 40

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category:

Received: Mar. 24, 2011

Accepted: --

Published Online: Sep. 27, 2011

The Author Email: Quan-dai WANG (quandaiw@163.com)

DOI:10.3969/j.issn.1003-501x.2011.09.008

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology