Journal of Inorganic Materials, Volume. 35, Issue 1, 19(2020)
[13] GORDON R G. Criteria for choosing transparent conductors[J]. MRS Bulletin, 25, 52-57(2000).
[19] SUBRAMANYAM T K, GOUTHAM P, PAVAN KUMAR S et al. Optimization of sputtered AZO thin films for device application[C]. Materials Today: Proceedings, 5, 10851-10859(2018).
[20] LÜ K, ZHU B L, LI K et al. Effect of hydrogen and Cu interlayer on the optical and electrical properties of GZO thin film[J]. Journal of Inorganic Materials, 29, 494-497(2014).
[21] CHEN D, LÜ J G, HUANG J Y et al. Performances of GaN-based LEDs with AZO films as transparent electrodes[J]. Journal of Inorganic Materials, 28, 650-652(2013).
[22] QIN X J, HAN S H Z, ZHAO L et al. Fabrication of transparent conductive Al-doped ZnO thin films by aerosol-assisted chemical vapour deposition[J]. Journal of Inorganic Materials, 26, 608-611(2011).
[33] WEBER F R, FONTAINE F, SCHEIB M et al. Cathodic arc evaporation of (Ti, Al) N coatings and (Ti, Al) N/TiN multilayer-coatings-correlation between lifetime of coated cutting tools, structural and mechanical film properties[J]. Surface and Coatings Technology, 227-232(2004).
[43] SPENCER P, HOLLECK H. Application of a thermochemical data-bank system to the calculation of metastable phase formation during PVD od carbide, nitride and boride coatings[J]. High Temperature Science, 27, 295-309(1990).
[46] ZENG K J, SCHMID-FETAER R. Thermodynamic Modeling and Applications of the Ti-Al-N Phase Diagram[J]. Thermodynamics of Alloy Formation, 275-293(1997).
[47] SPENCER P. Thermodynamic prediction of metastable coating structures in PVD processes[J]. Zeitschrift für Metallkunde, 92, 1145-1150(2001).
[49] MAYRHOFER P, MUSIC D, SCHNEIDER J et al. Influence of the Al distribution on the structure, elastic properties, and phase stability of supersaturated Ti1-
[55] SANGIOVANNI D, ALLING B, STENETEG P et al. Self- interstitial diffusion, and Frenkel-pair formation/dissociation in B1 TiN studied by
[56] ALLING B, STENETEG P, THOLANDER C et al. Configurational disorder effects on adatom mobilities on Ti1-
[59] CANTOR B, CAHN R. Metastable alloy phases by co-sputtering[J]. Acta Materialia, 24, 845-852(1976).
[64] PRANGE R, CREMER R, NEUSCHÜTZ D et al. Plasma- enhanced CVD of Plasma- enhanced CVD of (Ti,Al) N films from chloridic precursors in a DC glow discharge[J]. Surface and Coatings Technology, 208-214(2000).
[67] GROVENOR C R M, HENTZELL H T G, SMITH D A et al. The development of grain structure during growth of metallic films.
[69] EINSTEIN A. Elementare teorie der brownschen bewegung[J]. Z Elektrochem, 14, 371-381(1908).
[80] KLOCKE F, DAMBON O, YI A Y et al. Process Chain for the Replication of Complex Optical Glass Components[J]. Berlin Heidelberg: Springer, 119-132(2013).
[81] MA K J, CHIEN H H, CHUAN W H et al. Design of protective coatings for glass lens molding.
[84] BOBZIN K, BAGCIVAN N, BRÖGELMANN T et al. Development and qualification of a MSIP PVD iridium coating for precision glass moulding[J]. Materials Sciences and Application, 44, 673-678(2013).
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Ye-Yan HUANG, Kai XU, Bo WU, Peng LI, Ke-Ke CHANG, Feng HUANG, Qing HUANG.
Category: REVIEW
Received: Jun. 3, 2019
Accepted: --
Published Online: Feb. 24, 2021
The Author Email: Ke-Ke CHANG (changkeke@nimte.ac.cn)