Fig. 1. Schematic principle of ion beam figuring

Fig. 2. Definition of tool influence function

Fig. 3. Targeting surface

Fig. 4. Surfaces of shell ribs in simulation processing

Fig. 5. RMSD analysis of theoretical processing results

Fig. 6. Flowchart of high-frequency residual compensation

Fig. 7. Surfaces of shell ribs in simulation fabrication

Fig. 8. RMSD analysis of theoretical processing results before and after compensation

Fig. 9. Amplitude analysis of theoretical processing results before and after compensation

Fig. 10. Initial surface

Fig. 11. Experimental process

Fig. 12. Comparison of processing surfaces before and after compensation

Fig. 13. Comparison of RMSD between actual processing results before and after compensation

Fig. 14. Amplitude analysis of actual processing results before and after compensation