Journal of Applied Optics, Volume. 40, Issue 1, 132(2019)

Laser confocal automatic adjustment system for attitude of spherical component

GUO Hao, XIAO Yang, DONG Song, WANG Longxiao, and ZHAO Weiqian
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  • [in Chinese]
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    References(13)

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    [5] [5] GU Zhiyuan, YAN Changxiang, HU Chunhui, et al. Coordinate datum transition method for optical system computer-aided alignment[J]. Acta Optica Sinica, 2014, 34(3): 0322003-2.

    [6] [6] JIANG Hong.The structure design of nanometer rResolution overloading electronic two-dimension adjusting frame[D].Changchun: Changchun University of Science and Technology,2012: 1-3.

    [7] [7] WANG Xu, QIU Lirong, ZHAO Weiqian, et al. Error analysis for a laser differential confocal radius measurement system[J]. Applied Optics, 2015, 54(5): 1081-1082.

    [9] [9] ZHANG Jianhuan, ZHOU Junxian. Effect of tilt angle of surface to be measured on differential confocal microscope pointing signal[J]. Acta Optica Sinica, 2006,26(9): 1365-1366.

    [10] [10] ZHANG Yanan, SHEN Lili, SHEN Weixing, et al. Design of support distribution for attitude-adjusting mechanism of large lens[J]. Optics and Precision Engineering, 2010,18(12): 2626-2628.

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    GUO Hao, XIAO Yang, DONG Song, WANG Longxiao, ZHAO Weiqian. Laser confocal automatic adjustment system for attitude of spherical component[J]. Journal of Applied Optics, 2019, 40(1): 132

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    Paper Information

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    Received: Jul. 9, 2018

    Accepted: --

    Published Online: Apr. 2, 2019

    The Author Email:

    DOI:10.5768/jao201940.0107001

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