Chinese Journal of Lasers, Volume. 42, Issue 7, 708004(2015)

Study and Application on Transparent Plate Thickness Measurement Based on Laser Triangulation with Light Compensation

Yang Guishuan1、*, Chen Tao1, and Zhang Zhifeng2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    References(13)

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    CLP Journals

    [1] XIAO Chang-jiang, ZHANG Jing-chao, ZHENG Lian-jun. Error Suppression of Glass Online Laser Thickness Measurement Using Complementation of Transmission and Reflection[J]. Acta Photonica Sinica, 2017, 46(2): 212001

    [2] Sun Yuwen, Li Shiguang, Ye Tianchun, Zong Mingcheng. Process Dependency of Focusing and Leveling Measurement System in Nanoscale Lithography[J]. Acta Optica Sinica, 2016, 36(8): 812001

    [3] Guo Jirong, Li Changyong, Wurikaixi·Aiyiti. Simple Calibration of Monocular Vision Measurement System in Cladding Layer Detection[J]. Laser & Optoelectronics Progress, 2018, 55(8): 81203

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    Yang Guishuan, Chen Tao, Zhang Zhifeng. Study and Application on Transparent Plate Thickness Measurement Based on Laser Triangulation with Light Compensation[J]. Chinese Journal of Lasers, 2015, 42(7): 708004

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    Paper Information

    Category: Measurement and metrology

    Received: Jan. 25, 2015

    Accepted: --

    Published Online: Sep. 24, 2022

    The Author Email: Guishuan Yang (yguishuan@126.com)

    DOI:10.3788/cjl201542.0708004

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