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Chinese Journal of Lasers, Volume. 42, Issue 8, 807001(2015)

Effects of RF Magnetron Sputtering Power on Structure and Properties of the Optical Vanadium Oxide Films

Zhang Jianpeng1、*, Huang Meidong1, Li Yuan1, Yang Mingmin1, and Zhang Pengyu2
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    Zhang Jianpeng, Huang Meidong, Li Yuan, Yang Mingmin, Zhang Pengyu. Effects of RF Magnetron Sputtering Power on Structure and Properties of the Optical Vanadium Oxide Films[J]. Chinese Journal of Lasers, 2015, 42(8): 807001

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    Paper Information

    Category: Thin Films

    Received: Feb. 12, 2015

    Accepted: --

    Published Online: Sep. 24, 2022

    The Author Email: Jianpeng Zhang (lxft2009@163.com)

    DOI:10.3788/cjl201542.0807001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology