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Optical Technique, Volume. 47, Issue 3, 321(2021)

High-precision retractable PZT driving power technology for phase-shifting interferometry

ZHENG Chao1,2、*, HE Qi1,2, ZHOU Shi1,2, YANG Shuai1,2, CUI Jian1,2, and QIU Lirong1,2
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    ZHENG Chao, HE Qi, ZHOU Shi, YANG Shuai, CUI Jian, QIU Lirong. High-precision retractable PZT driving power technology for phase-shifting interferometry[J]. Optical Technique, 2021, 47(3): 321

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    Paper Information

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    Received: Jan. 22, 2021

    Accepted: --

    Published Online: Aug. 22, 2021

    The Author Email: ZHENG Chao (zhengchao9695@163.com)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology