Chinese Journal of Lasers, Volume. 47, Issue 1, 0100001(2020)

Application of Laser Lift-off Technique in Flexible Electronics Manufacturing

Lingfei Ji1,2、*, Rui Ma1,2, Ximin Zhang1,2, Zhengyang Sun1,2, and Xin Li1,2
Author Affiliations
  • 1Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China
  • 2Key Laboratory of Trans-Scale Laser Manufacturing Technology, Ministry of Education, Beijing 100124, China
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    Figures & Tables(10)
    Fabrication scheme of flexible displays by means of excimer LLO[15]
    SEM images of microstructures of PI-glass interface induced by different laser energy densities[16]. (a) Before irradiation; (b) 80 mJ·cm-2; (c) 87 mJ·cm-2; (d) 93 mJ·cm-2
    Schematic of separation process for PZT thin film using LLO method[25]
    Schematic illustrations of process for fabricating RRAM on flexible substrate via LLO method[32]
    FoWLP chip package process[34]
    Schematic illustration of selective laser lift-off[35]
    Principle of tmSLADT technique[38]
    Si microchips transferred by tmSLADT technique[39]
    Schematic of ultrafast laser-treated thin film[45]
    TEM images of cross sections of thin films processed by LLO. (a) Picosecond laser; (b) femtosecond laser[45]
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    Lingfei Ji, Rui Ma, Ximin Zhang, Zhengyang Sun, Xin Li. Application of Laser Lift-off Technique in Flexible Electronics Manufacturing[J]. Chinese Journal of Lasers, 2020, 47(1): 0100001

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    Paper Information

    Category: reviews

    Received: Jul. 22, 2019

    Accepted: Sep. 3, 2019

    Published Online: Jan. 9, 2020

    The Author Email: Lingfei Ji (ncltji@bjut.edu.cn)

    DOI:10.3788/CJL202047.0100001

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