Fig. 1. Principle of experimental setup using deflectometry

Fig. 2. Screen rotating about axes. (a) Rotating about x axis; (b) rotating about y axis; (c) rotating about z axis

Fig. 3. Vector map of slope error when screen rotates about z axis

Fig. 4. Difference between surface errors calculated by sensitivity equation and ZEMAX model when screen tilts about axes. (a) Rotating about x axis; (b) rotating about y axis; (c) Zernike coefficient

Fig. 5. Experimental setup and experimental results. (a) Experimental setup; (b) Zernike coefficients of the 5th, 6th terms; (c) Zernike coefficients of the 7th-20th terms