Fig. 1. Schematic of profile deviation detection for stage x axis mirror

Fig. 2. (a) Diagram of relative displacement measurement of interferometer; (b) zero error of stage mirror

Fig. 3. Zero error caused by zero deviation when α=5 nm

Fig. 4. Diagram of experimental system

Fig. 5. (a) Original results; (b) measured results, (c) average value and (d) standard deviation after eliminating zero error