Laser & Optoelectronics Progress, Volume. 54, Issue 11, 113104(2017)
Performance Comparison of TiAlC Films Prepared with Different Precursors
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Yang Yongliang, Li Na, Zhang Hongyun. Performance Comparison of TiAlC Films Prepared with Different Precursors[J]. Laser & Optoelectronics Progress, 2017, 54(11): 113104
Paper Information
Category: Thin Films
Received: May. 5, 2017
Accepted: --
Published Online: Nov. 17, 2017
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