Fig. 1. Schematics of spatial light modulators. (a) Principle of DMD^[15]; (b) diagrams of LC-SLM without voltage (left) and with applied voltage higher than threshold (right)^[17]

Fig. 2. Flowchart of the GS iteration algorithm^[19]

Fig. 3. Principle of calculating hologram based on deep learning^[42]

Fig. 4. Schematics of aberrations induced during laser fabrication. (a) Spherical aberration induced when laser is focused into sample^[47]; (b) aberration induced when laser is close to sample edge^[48]

Fig. 5. Aberration correction based on SLM. (a) Comparison of helical spot arrays fabricated by ultrafast laser machining in diamond and fused silica before and after aberration compensation^[47]; (b) comparison of fiber Bragg grating structures fabricated by ultrafast laser machining before (right) and after (left) aberration compensation^[52]; (c) results at different depths of structures fabricated by ho

Fig. 6. Schematic of ultrafast laser parallel processing system based on spatial light modulator^[57]

Fig. 7. Multi-focus parallel machining based on SLM. (a) Optical microscope image of character dot array fabricated with multi-focus parallel machining technique^[57]; (b) SEM images of 3D cell culture substrates fabricated by 4-focus scan (left) and 6-focus scan (right) techniques^[59]

Fig. 8. Multi-dimensional optical data storage applications based on SLM multi-focus parallel writing. (a) Five-dimensional permanent optical storage data recording by multi-focus array^[61]; (b) 3D multi-focus array generated based on Debye diffraction theory after aberration compensation^[35]

Fig. 9. Three-dimensional structures produced by single exposure or scanning. (a) SEM images of 3D microstructures printed by 3D adjustment for focusing light field: single-exposure (left), single-scan (middle), and single-exposure & single-scan (right)^[12]; (b) 3D double-helix structures fabricated by single-exposure based on SLM^[64]

Fig. 10. Ultrafast laser simultaneous spatial and temporal focusing (SSTF) parallel processing. (a) Schematic of light path of ultrafast laser simultaneous spatial and temporal focusing (SSTF) parallel processing^[66]; (b) 3D multifocal array generated by system in Fig. 10(a) and processing results^[66]; (c) complex 3D structures printed by DMD based ultrafast laser SSTF

Fig. 11. Structured light field generated by SLM. (a) 16 kinds of structured light fields generated by double reflection of SLM^[71]; (b) 16-vector-Bessel-beam-array generated by SLM^[73]

Fig. 12. Applications of structured light fields. (a) Schematic of super-diffraction parallel storage based on SLMs^[75]; (b) split-ring structure fabricated by two vortex beams^[76]; (c) microstructures fabricated by controlling phase factor of vortex beam^[77]; (d) microcages fabricated by using Bessel and Mathieu beams^[7