Antistatic and antireflection coating using indium tin oxide prepared by magnetron reactive sputtering

Haixing Chen; Yuyong Huang; Xuanqian Xu; Shengyuan Bai

doi:10.3788/COL201008s1.0201

Chinese Optics Letters, Volume. 8, Issue s1, 201(2010)

Antistatic and antireflection coating using indium tin oxide prepared by magnetron reactive sputtering

Haixing Chen, Yuyong Huang, Xuanqian Xu, and Shengyuan Bai

Author Affiliations

Optics Division, Oerlikon (Shanghai) Co., Ltd., Shanghai 200131, China

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References(7)

[1] [1] H. P. Lobl, M. Huppertz, and D. Mergel, Surf. Coatings Tech. 82, 90 (1996).

[2] [2] N. G. Marechal and R. S. Blacker, "Anti-static, antireflection coating" Patent US 6852406 (2005).

[3] [3] J. F. Smith, A. J. Aronson, D. Chen, and W. H. Class, Thin Solid Films 72, 469 (1980).

[4] [4] J. George and C. S . Menon, Surf. Coatings Technol. 132, 45 (2000).

[5] [5] C. May and J. Strumpfel, Thin Solid Films 351, 48 (1999).

[6] [6] M. Losurdo, M. Giangregorio, P. Capezzuto, G. Bruno, R. De Rosa, F. Roca, C. Summonte, J. Pla, and R. Rizzoli, J. Vac. Sci. Technol. A 20, 37 (2002).

[7] [7] H. A. Macleod, Thin-film optical filters (Adam Hilger Ltd., Bristol, 1986).

Cited By

[1] A. Bagheri Khatibani, S.M. Rozati, Z. Bargbidi. Preparation, Study and Nanoscale Growth of Indium Oxide Thin Films. Acta Physica Polonica A, 122, 220(2012).

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Haixing Chen, Yuyong Huang, Xuanqian Xu, Shengyuan Bai, "Antistatic and antireflection coating using indium tin oxide prepared by magnetron reactive sputtering," Chin. Opt. Lett. 8, 201 (2010)

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Paper Information

Received: Dec. 3, 2009

Accepted: --

Published Online: May. 14, 2010

The Author Email:

DOI:10.3788/COL201008s1.0201

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology