Piezoelectrics & Acoustooptics, Volume. 46, Issue 6, 995(2024)
Design of a Transmissive Deformable Lens for Compensating Optical Aberrations of Lithography Object Lens
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ZOU Youyun, BU Yifan, DU Wenjie, DENG Jie, MA Jianqiang. Design of a Transmissive Deformable Lens for Compensating Optical Aberrations of Lithography Object Lens[J]. Piezoelectrics & Acoustooptics, 2024, 46(6): 995
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Received: Sep. 8, 2024
Accepted: Feb. 13, 2025
Published Online: Feb. 13, 2025
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