Piezoelectrics & Acoustooptics, Volume. 46, Issue 6, 995(2024)

Design of a Transmissive Deformable Lens for Compensating Optical Aberrations of Lithography Object Lens

ZOU Youyun... BU Yifan, DU Wenjie, DENG Jie and MA Jianqiang |Show fewer author(s)
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  • Faculty of Mechanical Engineering and Mechanics, Ningbo University, Ningbo 315211, China
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    ZOU Youyun, BU Yifan, DU Wenjie, DENG Jie, MA Jianqiang. Design of a Transmissive Deformable Lens for Compensating Optical Aberrations of Lithography Object Lens[J]. Piezoelectrics & Acoustooptics, 2024, 46(6): 995

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    Paper Information

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    Received: Sep. 8, 2024

    Accepted: Feb. 13, 2025

    Published Online: Feb. 13, 2025

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2024.06.026

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