Jones Pupil Measurement Method of Lithographic Projection Lens

Zejiang Meng; Sikun Li; Xiangzhao Wang; Yang Bu; Chaoxing Yang

doi:10.3788/AOS201939.0312004

Acta Optica Sinica, Volume. 39, Issue 3, 0312004(2019)

Jones Pupil Measurement Method of Lithographic Projection Lens

Zejiang Meng^1,2, Sikun Li^1,2、*, Xiangzhao Wang^1,2、*, Yang Bu^1,2, and Chaoxing Yang^1,2

¹ Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

² University of Chinese Academy of Sciences, Beijing 100049, China

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Figures & Tables(12)

Fig. 1. Approximate polar decomposition of Jones matrix[12]

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Fig. 2. Pupil maps of OZP[13]

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Fig. 3. Schematic of Jones pupil measurement device

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Fig. 4. Original Jones pupil. (a) Diattenuation; (b) retardation

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Fig. 5. OZP coefficients of original Jones pupil. (a) Diattenuation; (b) retardation

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Fig. 6. Measured Jones pupil by proposed method. (a) Diattenuation; (b) retardation

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Fig. 7. Measured diattenuation of the proposed and the conventional method under different error settings. (a) Conventional method, without errors; (b) conventional method, with errors; (c) proposed method, without errors; (d) proposed method, with errors

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Fig. 8. Amplitude errors of measured Jones pupil by proposed method. (a) Diattenuation; (b) retardation

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Fig. 9. OZP coefficient errors of measured Jones pupil by proposed method. (a) Diattenuation; (b) retardation

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Table 1. Error sources in Jones pupil measurement device
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Table 1. Error sources in Jones pupil measurement device
Error type Error source Value
Random Noise of image sensor σ(ΔI)=0.003
(Normal distribution) Orientation angle errors σ(Δθ)=0.1°
Systematic Diattenuation errors η=0.01
Retardation errors δ=0.001π

Table 2. Three typical angle configurations

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Table 2. Three typical angle configurations

Configuration	P₁ angle θ₁ /(°)	Q₁ angle ϕ₁ /(°)	Q₂ angle ϕ₂ /(°)	P₂ angle θ₂ /(°)
1×144×1	0°	0°, 1.25°, 2.5°, …, 178.75°	6×ϕ₁	0°
4×4×9×1	0°, 45°, 90°, 135°	0°, 45°, 90°, 135°	0°, 12°, 24°, …, 180°	0°
4×4×4×4	0°, 45°, 90°, 135°	0°, 45°, 90°, 135°	0°, 45°, 90°, 135°	0°, 45°, 90°, 135°

Table 3. Measurement errors comparison between the proposed and the conventional method under different angle configurations of polarization elements

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Table 3. Measurement errors comparison between the proposed and the conventional method under different angle configurations of polarization elements

Configuration	Method	E_RMS-D /10^-3	E_RMS-R /(10^-3 rad)	E_RSS-OZP-D /10^-3	E_RSS-OZP-R /10^-3
1×144×1	Conventional method	9.77	10.80	7.27	8.70
	Proposed method	2.31	2.98	2.01	5.13
4×4×9×1	Conventional method	7.66	8.09	5.42	5.79
	Proposed method	1.54	1.65	1.40	2.60
	Conventional method	3.15	3.42	1.91	1.49
4×4×4×4	Proposed method	0.84	0.70	0.73	0.79
	Raw Jones pupil	50.0	155.1	50.0	154.6

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Zejiang Meng, Sikun Li, Xiangzhao Wang, Yang Bu, Chaoxing Yang. Jones Pupil Measurement Method of Lithographic Projection Lens[J]. Acta Optica Sinica, 2019, 39(3): 0312004

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