Chinese Optics Letters, Volume. 11, Issue s1, S10305(2013)
Study on optical anisotropy properties of SiO2 films with different thermal annealing temperatures
[1] [1] K. Kintaka, J. Nishii, A. Mizutani, H. Kikuta, and H. Nakano, Opt. Lett. 26, 1642 (2001).
[2] [2] Y. A. Zhao, T. Wang, D. W. Zhang, J. D. Shao, and Z. X. Fan, Appl. Surf. Sci. 245, 335 (2005).
[3] [3] L. pinard, B. Sassolas, R. Flaminio, D. Forest, A. Lacoudre, C. Michel, J. L. Montorio, and N. Morgado, Opt. Lett. 36, 1407 (2011).
[4] [4] N. Charnd, J. E. Johnson, J.W. Oscenbach,W. C. Liang, L. C. Feldman, W. T. Tsang, H. W. Krautter, M. Passlack, R. Hull, and V. Swaminathan, J. Cryst. Growth. 148, 336 (1995).
[5] [5] T. Harada, Y. Yamada, H. Uyama, T. Murata, and H. Nozoye, Thin Solid Films 392, 191 (2001).
[6] [6] J. Z. Wang, Y. Q. Xiong, D. S. Wang, and H. K. Liu, Physics Procedia 18, 143 (2011).
[7] [7] W.-F. Wu and B.-S. Chiou, Appl. Surf. Sci. 99, 237 (1996).
[8] [8] W. Klug and R. Schneider, Proc. SPIE 1323, 88 (1990).
[9] [9] H. G. Tompkins and W. A. McGahan, Spectroscopic Ellipsometry and Reflectometry: A User’s Guide (John Wiley & Sons, New York, 1999).
[10] [10] K. Vedam and S. Y. Kim, Appl. Opt. 28, 2691 (1989).
[11] [11] L. H. Gao, F. Lemarchand, and M. Lequime, Thin Solid Films 520, 501 (2011).
[12] [12] J. A. Dobrowolski, F. C. Ho, and A. Waldorf, Appl. Opt. 22, 3191 (1983).
[13] [13] C. Caliendo, E. Verona, and G. Saggio, Thin Solid Films 292, 255 (1997).
[14] [14] M. Sometani, R. Hasunuma, M. Ogino, H. Kuribayashi, Y. Sugahara, and K. Yamabe, Jpn. J. Appl. Phys. 48, 05DB03 (2009).
[15] [15] J. A. Woollam Co., Inc., Guide to Using WVASE32. 200.
[16] [16] L. Cauchy, Bull. Sci. Math. 14, 9 (1830).
[1] Luis V. Rodríguez-de Marcos, Juan I. Larruquert, José A. Méndez, José A. Aznárez.
[1] Luis V. Rodríguez-de Marcos, Juan I. Larruquert, José A. Méndez, José A. Aznárez.
[1] Luis V. Rodríguez-de Marcos, Juan I. Larruquert, José A. Méndez, José A. Aznárez.
[1] Luis V. Rodríguez-de Marcos, Juan I. Larruquert, José A. Méndez, José A. Aznárez.
Get Citation
Copy Citation Text
Huasong Liu, Yugang Jiang, Lishuan Wang, Chenghui Jiang, Yiqin Ji, Deying Chen, "Study on optical anisotropy properties of SiO2 films with different thermal annealing temperatures," Chin. Opt. Lett. 11, S10305 (2013)
Category: Measurement and characterization
Received: Nov. 15, 2012
Accepted: Jan. 4, 2013
Published Online: May. 30, 2013
The Author Email: