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Chinese Journal of Lasers, Volume. 27, Issue 3, 219(2000)

Measurement of Stair-like Surfaces’ Topography by Data-processing

[in Chinese]1, [in Chinese]1, [in Chinese]2, and [in Chinese]2
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    [1] [1] J. C. Wyant. Optical testers refine interferometry. Laser Focus World, 1991, 27(1): 139～147

    [2] [2] K. N. Prettyjohns. Charge-coupled device image acquisition for digital phase measurement interferometry. Opt. Eng., 1984, 23(4):371～378

    [3] [3] J. E. Greivenkamp. Sub-Nyquist interferometry. Appl. Opt., 1987, 26(24):5245～5258

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Measurement of Stair-like Surfaces’ Topography by Data-processing[J]. Chinese Journal of Lasers, 2000, 27(3): 219

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    Paper Information

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    Received: Oct. 18, 1998

    Accepted: --

    Published Online: Aug. 9, 2006

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology