Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Chinese Journal of Lasers, Volume. 39, Issue 3, 316002(2012)

A Digital-Grating-Based Alignment Technique in Maskless Lithography

Tang Lulu1,2、*, Hu Song1, Xu Feng1,2, Tang Yan1, Chen Mingyong1, and Zhu Jiangping1,2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
    • show less
    AbstractGet PDF(in Chinese)
    Figures&Tables (0)
    Equations (0)
    References (16)
    Tools
    Paper Information
    Topics
    Figures & Tables(0)
    Tools

    Get Citation

    Copy Citation Text

    Tang Lulu, Hu Song, Xu Feng, Tang Yan, Chen Mingyong, Zhu Jiangping. A Digital-Grating-Based Alignment Technique in Maskless Lithography[J]. Chinese Journal of Lasers, 2012, 39(3): 316002

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Category: Optical Design and Fabrication

    Received: Sep. 23, 2011

    Accepted: --

    Published Online: Feb. 22, 2012

    The Author Email: Lulu Tang (tanglulubbb@163.com)

    DOI:10.3788/cjl201239.0316002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology