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Journal of Synthetic Crystals, Volume. 52, Issue 11, 1961(2023)

Construction of Anisotropic Simulation Etching Model and Morphology Simulation of Mono-Crystalline Silicon

ZHANG Hui1,2, QIAN Jun1, and HONG Lili1
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    ZHANG Hui, QIAN Jun, HONG Lili. Construction of Anisotropic Simulation Etching Model and Morphology Simulation of Mono-Crystalline Silicon[J]. Journal of Synthetic Crystals, 2023, 52(11): 1961

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    Received: May. 17, 2023

    Accepted: --

    Published Online: Dec. 5, 2023

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    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology