Piezoelectrics & Acoustooptics, Volume. 45, Issue 5, 719(2023)
Low Temperature Drift Structure Design and Temperature Compensation of Quartz Resonant Accelerometer
References(2)
[2] [2] WANG S,WEI X,ZHAO Y,et al.A MEMS resonant accelerometer for low-frequency vibration detection［J］.Sensors and Actuators A Physical,2018,283:151-158.
[3] [3] DING H,MA Y,GUAN Y,et al.Duplex mode tilt measurements based on a MEMS biaxial resonant accelerometer［J］.Sensors and Actuators A Physical,2019,296:222-234.
Tools
Get Citation
Copy Citation Text
YANG Min, CHEN Fubin, ZHU Jialin, TIAN Wenjie. Low Temperature Drift Structure Design and Temperature Compensation of Quartz Resonant Accelerometer[J]. Piezoelectrics & Acoustooptics, 2023, 45(5): 719
Paper Information
Received: Jul. 3, 2023
Accepted: --
Published Online: Jan. 6, 2024
The Author Email:
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20