Acta Optica Sinica, Volume. 18, Issue 3, 369(1998)

Initial Approach for the All Optical Type Sillicon Micro-Mechanical Flow-Sensor

[in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Initial Approach for the All Optical Type Sillicon Micro-Mechanical Flow-Sensor[J]. Acta Optica Sinica, 1998, 18(3): 369

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    Paper Information

    Category: Optical Devices

    Received: Nov. 13, 1996

    Accepted: --

    Published Online: Oct. 18, 2006

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