Acta Optica Sinica, Volume. 18, Issue 3, 369(1998)
Initial Approach for the All Optical Type Sillicon Micro-Mechanical Flow-Sensor
A novel silicon micro mechanical sensor of all optical type is proposed. The theoretical analysis on structure and working principle of the sensor are presented, as well as the test and result of sample are expounded. The flow sensor has a structure of cantilever beam with ridge waveguide. The cantilever beam can be used as sensitive area of device and the probing optical beam may transmite in the ridge waveguide.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Initial Approach for the All Optical Type Sillicon Micro-Mechanical Flow-Sensor[J]. Acta Optica Sinica, 1998, 18(3): 369
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