Acta Physica Sinica, Volume. 68, Issue 10, 105202-1(2019)

Experimental investigation of plasma parameters in 13.56 MHz/2 MHz cylindrical inductively coupled plasma

Gai-Ling Zhang... Yue Hua, Ze-Yu Hao and Chun-Sheng Ren* |Show fewer author(s)
References(31)

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Gai-Ling Zhang, Yue Hua, Ze-Yu Hao, Chun-Sheng Ren. Experimental investigation of plasma parameters in 13.56 MHz/2 MHz cylindrical inductively coupled plasma[J]. Acta Physica Sinica, 2019, 68(10): 105202-1

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Paper Information

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Received: Jan. 14, 2019

Accepted: --

Published Online: Oct. 29, 2019

The Author Email:

DOI:10.7498/aps.68.20190071

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