Acta Physica Sinica, Volume. 68, Issue 10, 105202-1(2019)
[1] [1] Lieberman M A, Lichtenberg A J(translated by Pu Y K) 2004 Principles of Plasma Discharge and Materials Processing (Beijing: Science Press) pp119 (in Chinese)
[2] [2] Chabert P(translated by Wang Y N) 2015 Physics of Radio-Frequency Plasmas (Beijing: Science Press) pp115 (in Chinese)
[3] Xu S, Ostrikov K N, Li Y, Tsakadze E L, Jones I R[J]. Phys. Plasmas, 45, 20(2000).
[6] Ding Z F, Yuan G Y, Gao W, Sun J C[J]. Acta Phys. Sin., 57, 4304(2007).
[7] [7] Gao F 2011 Ph. D. Dissertation (Dalian: Dalian University of Technology) (in Chinese)
[8] [8] Zhao S X 2010 Ph. D. Dissertation (Dalian: Dalian University of Technology) (in Chinese)
[12] Jun H S, Chang H Y[J]. Appl. Phys. Lett., 92, 041501(2007).
[17] [17] Liu Y Z 2016 M. S. Thesis (Harbin: Harbin Institute of Technology) (in Chinese)
[18] [18] Zhang J 2006 M. S. Thesis (Dalian: Dalian University of Technology) (in Chinese)
[19] [19] Qi X L 2008 Ph. D. Dissertation (Dalian: Dalian University of Technology) (in Chinese)
[22] [22] Han X 2015 M. S. Thesis (Harbin: Harbin Institute of Technology) (in Chinese)
[26] [26] Liu Y 2017 M. S. Thesis (Dalian: Dalian University of Technology) (in Chinese)
[31] Setsuhara Y, Tsukiyama D, Takenaka K[J]. Surface & Coatings Technology, 202, 5238(2008).
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Gai-Ling Zhang, Yue Hua, Ze-Yu Hao, Chun-Sheng Ren.
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Received: Jan. 14, 2019
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Published Online: Oct. 29, 2019
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