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Acta Optica Sinica, Volume. 31, Issue 12, 1222005(2011)

Simulation and Fabracation of Multi-Micromirrors Used in Infrared Spectrometer

Zheng Ying1,2、*, Liang Zhongzhu1, and Liang Jingqiu1
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  • 1[in Chinese]
  • 2[in Chinese]
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    Zheng Ying, Liang Zhongzhu, Liang Jingqiu. Simulation and Fabracation of Multi-Micromirrors Used in Infrared Spectrometer[J]. Acta Optica Sinica, 2011, 31(12): 1222005

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Apr. 22, 2011

    Accepted: --

    Published Online: Nov. 21, 2011

    The Author Email: Ying Zheng (optics_zhy@yahoo.cn)

    DOI:10.3788/aos201131.1222005

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology