Acta Physica Sinica, Volume. 69, Issue 1, 016101-1(2020)

Effect of He ion irradiation on microstructure and electrical properties of graphene

Na Zhang, Bo Liu*, and Li-Wei Lin
Figures & Tables(7)
XPS C1 s peak spectra of graphene samples: (a) Unirradiated; (b) 0.7 × 1013 He+/cm2; (c) 1.6 × 1013 He+/cm2; (d) 2.5 × 1013 He+/cm2.石墨烯样品XPS C1 s峰谱图 (a)未辐照; (b) 0.7 × 1013 He+/cm2; (c) 1.6 × 1013 He+/cm2; (d) 2.5 × 1013 He+/cm2
The Raman spectra of unirradiated graphene.未辐照石墨烯Raman光谱图
The Raman spectra of graphene before and after He+ irradiation.He+辐照前后石墨烯Raman光谱图
The relationship between Raman peak strength ID/IG, I2D/IG ratio and irradiation dose.Raman峰强ID/IG, I2D/IG比值与辐照剂量的关系
Electrical conductivity versus gate voltage at different irradiation doses.不同辐照剂量下电导率随栅极电压变化曲线
The relation between Dirac voltage variation and irradiation dose.狄拉克电压偏移量与辐照剂量的关系
  • Table 1. C1 s peak area ratio of graphene samples before and after irradiation.

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    Table 1. C1 s peak area ratio of graphene samples before and after irradiation.

    辐照剂量C-C sp2C—C sp3C—O—HC—O—CO—C=O
    未辐照0.520.190.100.090.10
    0.7 × 1013 He+/cm20.500.300.130.050.02
    1.6 × 1013 He+/cm20.370.320.150.100.06
    2.5 × 1013 He+/cm20.280.350.200.120.05
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Na Zhang, Bo Liu, Li-Wei Lin. Effect of He ion irradiation on microstructure and electrical properties of graphene[J]. Acta Physica Sinica, 2020, 69(1): 016101-1

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Paper Information

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Received: Sep. 6, 2019

Accepted: --

Published Online: Nov. 4, 2020

The Author Email:

DOI:10.7498/aps.69.20191344

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