Acta Optica Sinica, Volume. 32, Issue 9, 912002(2012)

Analysis of Phase-Distribution Effect of Moiré Fringes on Alignment Precision

Zhu Jiangping1,2,3、*, Hu Song1, and Yu Junsheng2
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    Zhu Jiangping, Hu Song, Yu Junsheng. Analysis of Phase-Distribution Effect of Moiré Fringes on Alignment Precision[J]. Acta Optica Sinica, 2012, 32(9): 912002

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Mar. 5, 2012

    Accepted: --

    Published Online: Jul. 4, 2012

    The Author Email: Jiangping Zhu (zsyioe@163.com)

    DOI:10.3788/aos201232.0912002

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