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Chinese Journal of Lasers, Volume. 40, Issue 1, 116001(2013)

Stray Light Analysis of a Coaxial Two Reflect Mirror System and Optimized Design of Inner Photomask

Lin Jianchun1,2、*, Sun Liwei1, Chen Boyang3, Wang Wei1,2, Fan Bingqing1, and Chen Fansheng1
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    Article index updated: Mar. 10, 2025

    The article is cited by 12 article(s) CLP online library. (Some content might be in Chinese.)
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    Lin Jianchun, Sun Liwei, Chen Boyang, Wang Wei, Fan Bingqing, Chen Fansheng. Stray Light Analysis of a Coaxial Two Reflect Mirror System and Optimized Design of Inner Photomask[J]. Chinese Journal of Lasers, 2013, 40(1): 116001

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    Paper Information

    Category: rapid communications

    Received: Jul. 1, 2012

    Accepted: --

    Published Online: Jan. 5, 2013

    The Author Email: Jianchun Lin (jackeelim@163.com)

    DOI:10.3788/cjl201340.0116001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology