Design of Aspheric Microlens Made by Photoresist Reflow Method

Xiangyang Liu

doi:10.3788/AOS201939.0208001

Acta Optica Sinica, Volume. 39, Issue 2, 0208001(2019)

Design of Aspheric Microlens Made by Photoresist Reflow Method

Xiangyang Liu^1,2、*

¹ Key Laboratory of Infrared Imaging Materials and Detectors, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China

² University of Chinese Academy of Sciences, Beijing 100049, China

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Xiangyang Liu. Design of Aspheric Microlens Made by Photoresist Reflow Method[J]. Acta Optica Sinica, 2019, 39(2): 0208001

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Paper Information

Category: Geometric Optics

Received: Jul. 18, 2018

Accepted: Oct. 8, 2018

Published Online: May. 10, 2019

The Author Email:

DOI:10.3788/AOS201939.0208001

Topics

laser devices and laser physics

Lasers and Laser Optics

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laser manufacturing

Instrumentation, Measurement and Metrology