Fig. 1. Schematic configuration of the optical power splitter structure. (a) Top view; (b) Cross section of the waveguide

Fig. 2. L_MMI as a function of n(SiN_x), in which the inset shows the optical field distribution in the waveguide when n(SiN_x) is 1.8, 2.5 and 2.8, respectively

Fig. 3. n(SiN_x) as a function of θ under different W₁ when the MMI waveguide is polarization-insensitive

Fig. 4. IM of the splitter as a function of θ under different W₁. (a) TE mode; (b) TM mode

Fig. 5. 0.5 dB bandwidth of the splitter as a function of θ under different W₁. (a) TE mode; (b) TM mode

Fig. 6. IM of the splitter as a function of W_t1, W_t2 and W_t3. (a) TE mode; (b) TM mode

Fig. 7. EL of the splitter as a function of W_t1, W_t2 and W_t3. (a) TE mode; (b) TM mode

Fig. 8. Field distributions of the MMI 1×3 optical power splitter. (a) TE mode; (b) TM mode

Fig. 9. Performance parameters of the splitter as functions of wavelength. (a) L_MMI; (b) EL and IM

Fig. 10. Performance parameters including EL, PDL and IM as functions of wavelength. (a) EL and PDL; (b) IM