[1] [1] SUN M,ZHANG S,ZHENG P,et al.Exploring surface acoustic wave transversal filters on heterogeneous substrates for 5G N77 band[C]∥Venice,Italy:2022 IEEE International Ultrasonics Symposium (IUS),2022:1-4.

[2] [2] CHEN P,LI G,ZHU Z.Development and application of SAW filter[J]. Micromachines,2022,13(5):656.

[3] [3] TAKAI T,IWAMOTO H,TAKAMINE Y,et al.I.H.P. SAW technology and its application to microacoustic components(Invited)[C]∥Washington,DC,USA:2017 IEEE International Ultrasonics Symposium(IUS),2017:1-8.

[4] [4] LIU Y,LIU J,WANG Y,et al.A novel structure to suppress transverse modes in radio frequency TC-SAW resonators and filters[J]. IEEE Microwave and Wireless Components Letters, 2019, 29(4):249-251.

[5] [5] HASHIMOTO K Y,LI X,BAO J,et al.Transverse modes in temperature compensated surface acoustic wave devices[C]∥Kobe, Japan:2018 IEEE International Ultrasonics Symposium (IUS), 2018:1-9.

[6] [6] SOLAL M,GRATIER G,AIGNER R,et al.Piston mode acoustic wave device and method providing a high coupling factor:US-7939989-B2[P].2011-05-10.

[7] [7] SOLAL M,HOLMGREN O,KOKKONEN K,Design,simulation, and visualization of R-SPUDT devices with transverse mode suppression[J].IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2010, 57(2): 412-420.

[8] [8] HAYDL W H,DISCHLER B,HIESINGER P.Multimode SAW resonators-A method to study the optimum resonator design[C]∥Annapolis, MD, USA:1976 Ultrasonics Symposium, 1976: 287-296.

[9] [9] MATSUDA S,MIURA M,MATSUDA T,et al.Experimental studies of quality factor deterioration in shear-horizontal-type surface acoustic wave resonators caused by apodization of interdigital transducer[J].Jpn J Appl Phys,2011,7(2):07HD14.1-07HD014.3.

[10] [10] IWAMOTO H,TAKAI T,TAKAMINE Y,et al.Transverse modes in I.H.P. SAW resonator and their suppression method[C]∥Kobe, Japan:2018 IEEE International Ultrasonics Symposium (IUS), 2018:1-4.

[11] [11] TAKAI T,IWAMOTO H,TAKAMINE Y,et al.Incredible high performance SAW resonator on novel multi-layerd substrate[C]∥Tours, France:2016 IEEE International Ultrasonics Symposium(IUS),2016:1-4.

[12] [12] INOUE S,SOLAL M. LT/Quartz layered SAW substrate with suppressed transverse mode generation[C]∥Las Vegas,NV,USA:2020 IEEE International Ultrasonics Symposium (IUS),2020:1-4.

[13] [13] HAUS H A,WANG K L.Modes of grating waveguide[J].J Appl Phys,1978,49(3):1061-1069.

[14] [14] HAUS H A.Modes in SAW grating resonators[J].Journal of Applied Physics,1977,48(12): 4955-4961.

[15] [15] HIROTA K,NAKAMURA K.Analysis of SAW grating waveguides using 2-D coupling-of-modes equations [C]∥Atlanta,GA,USA:Proceedings of the 2001 IEEE Ultrasonics Symposium,2001:115-120.

[16] [16] HIROTA K,NAKAMURA K.Analysis of SAW grating waveguides considering velocity dispersion caused by reflectivity[C]∥Tahoe,NV,USA:Proceedings of the 1999 IEEE Ultrasonics Symposium,1999:221-226.

[17] [17] HASHIMOTO K Y,OMORI T,AHN C J.Extension of scalar potential formalism for transverse mode analysis of surface acoustic wave resonators[C]∥Orlando,FL,USA:2011 IEEE International Ultrasonics Symposium,2011:333-336.

[18] [18] KOZLOV A V,MOZHAEV V G,ZYRYANOVA A.Waveguide effect under ‘antiguiding’ conditions in graded anisotropic media[J].Journal of Physics:Condensed Matter,2010,22(7):075401.