Fig. 1. Schematic diagram of sensing device

Fig. 2. Configuration of strain measuring sensing diaphragm

Fig. 3. Shape drawing of temperature compensated diaphragm

Fig. 4. Strain finite element analysis of temperature compensated diaphragm

Fig. 5. Schematic diagram of test device

Fig. 6. Wavelength variation curves with temperature. (a) Strain measuring diaphragm; (b) temperature compensated diaphragm

Fig. 7. Relationship between temperature and wavelength. (a) First group; (b) second group; (c) third group

Fig. 8. Fitting results. (a) First group; (b) second group; (c) third group; (d) mean residual error