Fig. 1. Working principle of single photon LiDAR ranging system

Fig. 2. SPAD with HV p well/buried HV n+ deep junction structure

Fig. 3. Quench circuit

Fig. 4. Diagram of dTOF readout circuit

Fig. 5. Two-stage TDC. (a) Measurement principle ; (b) general structure of coarse timing

Fig. 6. Intersegment error and its solution. (a) Intersegment error ; (b) timing diagram of dual-chain TDC

Fig. 7. Error induced by duty cycle offset

Fig. 8. Delay and duty cycle compensation. (a) Pseudo-differential delay unit; (b) duty cycle compensation

Fig. 9. s-domain model of DLL

Fig. 10. Chip and test setup. (a) Test platform ; (b) micrograph of chip

Fig. 11. SPAD test results. (a) I-V characteristic of SPAD; (b) DCR; (c) PDP

Fig. 12. Output waveform of SPAD array quench circuit

Fig. 13. DLL lock characteristic at 300 MHz

Fig. 14. TDC measurement results. (a) TDC measurement accuracy; (b) TDC measurement error

Fig. 15. Nonlinear error of TDC. (a) DNL curve; (b) INL curve

Fig. 16. Results of dynamic characteristic test. (a) dTOF accuracy; (b) single-shot accuracy