Laser & Optoelectronics Progress, Volume. 54, Issue 11, 113102(2017)
Reproducibility of Thin Films Deposited on Microstructure Surface by PECVD Technology
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Pan Yongqiang, Chen Jia. Reproducibility of Thin Films Deposited on Microstructure Surface by PECVD Technology[J]. Laser & Optoelectronics Progress, 2017, 54(11): 113102
Paper Information
Category: Thin Films
Received: Jun. 3, 2017
Accepted: --
Published Online: Nov. 17, 2017
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