Fig. 1. Focused imaging diagram of planar lobster eye optical device. (a) Diagram of structure; (b) principle of focused imaging

Fig. 2. Diagrams of planar lobster eye X-ray vacuum test equipment. (a) Diagram of equipment; (b) physical map of test chamber; (c) clamping fixture with low stress

Fig. 3. Focused imaging results of flat MPO at different focusing positions. (a) 3600 mm; (b) 3620 mm; (c) 3650 mm; (d) 3700 mm

Fig. 4. Contour distributions of focused imaging. (a) Partial enlargement map of secondary focal spot; (b) contour map corresponding to secondary focal spot

Fig. 5. Results of repeated test of angular resolution

Fig. 6. Focused images in central region of 13 mm×13 mm. (a) Focused imaging results; (b) contour map of secondary focal spot

Fig. 7. Schematic diagrams of tilt type defect structure. (a) Ideal condition; (b) square channel deviating from ideal position with deviating angle of θ

Fig. 8. Imaging results of flat MPO in different areas. (a) p1; (b) p2; (c) p3; (d) p4; (e) p5; (f) p6; (g) p7; (h) p8; (i) p9

Fig. 9. Simulation results by Monte Carlo. (a) 1^st group; (b) 2^nd group