Fig. 1. Schematic of femtosecond laser processing setup with dynamic oscillatory scanning system

Fig. 2. Scanning paths and cross sections of corresponding microgrooves. (a) Scanning path without dynamic oscillation; (b)‒(e) dynamic oscillatory scanning paths; (f)‒(j) cross sections of corresponding microgrooves

Fig. 3. Surface morphologies of quartz glass microgrooves processed under different scanning strategies. (a) Scanning without oscillation; (b) parallel oscillatory scanning

Fig. 4. Microgroove depth on quartz glass surface versus stage translation speed under different scanning strategies

Fig. 5. Effect of oscillatory scanning amplitude on cross-section shape of microgroove under concentric-circular scanning path. (a) Cross section of machined microgrooves; (b) schematic of concentric-circle scanning path; (c) depth and depth-to-width ratio versus oscillatory scanning amplitude; (d) correspondence between outer diameter of concentric circle and line spacing

Fig. 6. Modulation of U-and V-shaped cross sections achieved by changing dynamic oscillatory scanning path. (a)(b) Dynamic oscillatory scanning paths with different space distributions; (c) U-shaped cross section; (d) V-shaped cross section