[1] M. Pantouvaki, S. A. Srinivasan, Y. Ban, P. De Heyn, P. Verheyen, G. Lepage, H. Chen, J. De Coster, N. Golshani, S. Balakrishnan, P. Absil, J. Van Campenhout. Active components for 50 Gb/s NRZ-OOK optical interconnects in a silicon photonics platform. J. Lightwave Technol., 35, 631-638(2017).

[2] X. Chen, M. M. Milosevic, S. Stanković, S. Reynolds, T. D. Bucio, K. Li, D. J. Thomson, F. Gardes, G. T. Reed. The emergence of silicon photonics as a flexible technology platform. Proc. IEEE, 106, 2101-2116(2018).

[3] R. Baets, A. Z. Subramanian, S. Clemmen, B. Kuyken, P. Bienstman, N. Le Thomas, G. Roelkens, D. Van Thourhout, P. Helin, S. Severi. Silicon photonics: silicon nitride versus silicon-on-insulator. Optical Fiber Communications Conference and Exhibition (OFC), 1-3(2016).

[4] M. J. Heck. Highly integrated optical phased arrays: photonic integrated circuits for optical beam shaping and beam steering. Nanophotonics, 6, 93-107(2017).

[5] B. Behroozpour, P. A. M. Sandborn, M. C. Wu, B. E. Boser. Lidar system architectures and circuits. IEEE Commun. Mag., 55, 135-142(2017).

[6] J. Hecht. Lidar for self-driving cars. Opt. Photonic News, 29, 26-33(2018).

[7] C. V. Poulton, M. J. Byrd, P. Russo, E. Timurdogan, M. Khandaker, D. Vermeulen, M. R. Watts. Long-range lidar and free-space data communication with high-performance optical phased arrays. IEEE J. Sel. Top. Quantum Electron., 25, 7700108(2019).

[8] S. A. Miller, C. T. Phare, Y.-C. Chang, X. Ji, O. A. J. Gordillo, A. Mohanty, S. P. Roberts, M. C. Shin, B. Stern, M. Zadka, M. Lipson. 512-element actively steered silicon phased array for low-power lidar. Conference on Lasers and Electro-Optics, JTh5C.2(2018).

[9] M. Watts. Towards an integrated photonic LIDAR chip. Imaging and Applied Optics, AIW4C.1(2015).

[10] C.-Y. Hsu, G.-Z. Yiu, Y.-C. Chang. Free-space applications of silicon photonics: a review. Micromachines, 13, 990(2022).

[11] C. V. Poulton, M. J. Byrd, M. Raval, Z. Su, N. Li, E. Timurdogan, D. Coolbaugh, D. Vermeulen, M. R. Watts. Large-scale silicon nitride nanophotonic phased arrays at infrared and visible wavelengths. Opt. Lett., 42, 21-24(2017).

[12] N. A. Tyler, D. Fowler, S. Malhouitre, S. Garcia, P. Grosse, W. Rabaud, B. Szelag. Sin integrated optical phased arrays for two-dimensional beam steering at a single near-infrared wavelength. Opt. Express, 27, 5851-5858(2019).

[13] W. Bogaerts, S. Dwivedi, R. Jansen, X. Rottenberg, M. S. Dahlem. A 2D pixelated optical beam scanner controlled by the laser wavelength. IEEE J. Sel. Top. Quantum Electron., 27, 6100512(2021).

[14] M. Okano, C. Chong. Swept source lidar: simultaneous FMCW ranging and nonmechanical beam steering with a wideband swept source. Opt. Express, 28, 23898-23915(2020).

[15] Y. Zhang, Y. Li, P. Liu, Z. Zhang. Dual-beam antenna array using integrated butler feeding network. International Symposium on Antennas and Propagation (ISAP), 1-2(2019).

[16] H. Ren, H. Zhang, Y. Jin, Y. Gu, B. Arigong. A novel 2-D 3 × 3 Nolen matrix for 2-D beamforming applications. IEEE Trans. Microw. Theory Tech., 67, 4622-4631(2019).

[17] D. A. B. Miller. Self-configuring universal linear optical component. Photonics Res., 1, 1-15(2013).

[18] D. C. Tzarouchis, M. J. Mencagli, B. Edwards, N. Engheta. Mathematical operations and equation solving with reconfigurable metadevices. Light Sci. Appl., 11, 263(2022).

[19] C. V. Poulton, A. Yaacobi, D. B. Cole, M. J. Byrd, M. Raval, D. Vermeulen, M. R. Watts. Coherent solid-state lidar with silicon photonic optical phased arrays. Opt. Lett., 42, 4091-4094(2017).

[20] C. Monat, C. Grillet, M. Collins, A. Clark, J. Schroeder, C. Xiong, J. Li, L. O’Faolain, T. F. Krauss, B. J. Eggleton, D. J. Moss. Integrated optical auto-correlator based on third-harmonic generation in a silicon photonic crystal waveguide. Nat. Commun., 5, 3246(2014).

[21] A. Lukashchuk, J. Riemensberger, M. Karpov, J. Liu, T. J. Kippenberg. Dual chirped microcomb based parallel ranging at megapixel-line rates. Nat. Commun., 13, 3280(2022).

[22] K. V. Acoleyen, W. Bogaerts, J. Jágerská, N. L. Thomas, R. Houdré, R. Baets. Off-chip beam steering with a one-dimensional optical phased array on silicon-on-insulator. Opt. Lett., 34, 1477-1479(2009).

[23] K. Van Acoleyen, W. Bogaerts, R. Baets. Two-dimensional dispersive off-chip beam scanner fabricated on silicon-on-insulator. IEEE Photonics Technol. Lett., 23, 1270-1272(2011).

[24] K. V. Acoleyen, H. Rogier, R. Baets. Two-dimensional optical phased array antenna on silicon-on-insulator. Opt. Express, 18, 13655-13660(2010).

[25] X. Zhang, K. Kwon, J. Henriksson, J. Luo, M. C. Wu. A 20 × 20 focal plane switch array for optical beam steering. Conference on Lasers and Electro-Optics, SM1O.3(2020).

[26] C.-W. Baek, S. Song, C. Cheon, Y.-K. Kim, Y. Kwon. 2-D mechanical beam steering antenna fabricated using MEMS technology. IEEE MTT-S International Microwave Sympsoium Digest, 211-214(2001).

[27] J. Sun, E. S. Hosseini, A. Yaacobi, D. B. Cole, G. Leake, D. Coolbaugh, M. R. Watts. Two-dimensional apodized silicon photonic phased arrays. Opt. Lett., 39, 367-370(2014).

[28] J. Sun, E. Timurdogan, A. Yaacobi, Z. Su, E. S. Hosseini, D. B. Cole, M. R. Watts. Large-scale silicon photonic circuits for optical phased arrays. IEEE J. Sel. Top. Quantum Electron., 20, 264-278(2014).

[29] Q. Wang, S. Wang, L. Jia, Y. Cai, W. Yue, M. Yu. Increasing wavelength-controlled steering range of an optical phased array by using two subarrays. Appl. Opt., 60, 5424-5429(2021).

[30] K. Uehara, H. Kikuchi. Transmission of a Gaussian beam through a circular aperture. Appl. Opt., 25, 4514-4516(1986).

[31] T. G. Nguyen, R. S. Tummidi, T. L. Koch, A. Mitchell. Rigorous modeling of lateral leakage loss in SOI thin-ridge waveguides and couplers. IEEE Photonics Technol. Lett., 21, 486-488(2009).

[32] T. G. Nguyen, A. Boes, A. Mitchell. Lateral leakage in silicon photonics: theory, applications, and future directions. IEEE J. Sel. Top. Quantum Electron., 26, 8200313(2020).

[33] A. P. Hope, T. G. Nguyen, A. Mitchell, W. Bogaerts. Quantitative analysis of TM lateral leakage in foundry fabricated silicon rib waveguides. IEEE Photonics Technol. Lett., 28, 493-496(2016).

[34] T. Kim, P. Bhargava, C. V. Poulton, J. Notaros, A. Yaacobi, E. Timurdogan, C. Baiocco, N. Fahrenkopf, S. Kruger, T. Ngai, Y. Timalsina, M. R. Watts, V. Stojanović. A single-chip optical phased array in a wafer-scale silicon photonics/CMOS 3D-integration platform. IEEE J. Solid-State Circuits, 54, 3061-3074(2019).

[35] S. A. Miller, Y.-C. Chang, C. T. Phare, M. C. Shin, M. Zadka, S. P. Roberts, B. Stern, X. Ji, A. Mohanty, O. A. J. Gordillo, U. D. Dave, M. Lipson. Large-scale optical phased array using a low-power multi-pass silicon photonic platform. Optica, 7, 3-6(2020).

[36] C.-S. Im, B. Bhandari, K.-P. Lee, S.-M. Kim, M.-C. Oh, S.-S. Lee. Silicon nitride optical phased array based on a grating antenna enabling wavelength-tuned beam steering. Opt. Express, 28, 3270-3279(2020).

[37] M. Raval, C. V. Poulton, M. R. Watts. Unidirectional waveguide grating antennas with uniform emission for optical phased arrays. Opt. Lett., 42, 2563-2566(2017).

[38] R. Bruck, R. Hainberger. Efficient small grating couplers for low-index difference waveguide systems. Proc. SPIE, 7218, 72180A(2009).

[39] D. Kwong, A. Hosseini, J. Covey, Y. Zhang, X. Xu, H. Subbaraman, R. T. Chen. On-chip silicon optical phased array for two-dimensional beam steering. Opt. Lett., 39, 941-944(2014).

[40] P. F. Wang, G. Z. Luo, H. Y. Yu, Y. J. Li, M. Q. Wang, X. L. Zhou, W. X. Chen, Y. J. Zhang, J. Q. Pan. Improving the performance of optical antenna for optical phased arrays through high-contrast grating structure on SOI substrate. Opt. Express, 27, 2703-2712(2019).

[41] J. Chen, J. Wang, J. Li, Y. Yao, Y. Sun, J. Tian, Y. Zou, X. Zhao, X. Xu. Subwavelength structure enabled ultra-long waveguide grating antenna. Opt. Express, 29, 15133-15144(2021).

[42] M. Zadka, Y.-C. Chang, A. Mohanty, C. T. Phare, S. P. Roberts, M. Lipson. On-chip platform for a phased array with minimal beam divergence and wide field-of-view. Opt. Express, 26, 2528-2534(2018).

[43] C. V. Poulton, M. J. Byrd, P. Russo, B. Moss, O. Shatrovoy, M. Khandaker, M. R. Watts. Coherent lidar with an 8,192-element optical phased array and driving laser. IEEE J. Sel. Top. Quantum Electron., 28, 6100508(2022).

[44] W. Xu, Y. Guo, X. Li, C. Liu, L. Lu, J. Chen, L. Zhou. Fully integrated solid-state lidar transmitter on a multi-layer silicon-nitride-on-silicon photonic platform. J. Lightwave Technol., 41, 832-840(2022).

[45] Y. Tang, Z. Wang, L. Wosinski, U. Westergren, S. He. Highly efficient nonuniform grating coupler for silicon-on-insulator nanophotonic circuits. Opt. Lett., 35, 1290-1292(2010).

[46] P. Lampariello, A. Oliner. A new leaky wave antenna for millimeter waves using an asymmetric strip in groove guide, part I: theory. IEEE Trans. Antennas Propag., 33, 1285-1294(1985).

[47] A. Mallahzadeh, S. Mohammad-Ali-Nezhad. Long slot ridged SIW leaky wave antenna design using transverse equivalent technique. IEEE Trans. Antennas Propag., 62, 5445-5452(2014).

[48] D. R. Jackson, C. Caloz, T. Itoh. Leaky-wave antennas. Proc. IEEE, 100, 2194-2206(2012).

[49] Z. N. Chen, J. H. Choi, T. Itoh, D. Liu, H. Nakano, X. Qing, T. Zwick. Beam-scanning leaky-wave antennas. Handbook of Antenna Technologies, 3, 1698-1732(2016).

[50] F. Tischer. The groove guide, a low-loss waveguide for millimeter waves. IEEE Trans. Microw. Theory Tech., 11, 291-296(1963).

[51] P. Lampariello, F. Frezza, H. Shigesawa, M. Tsuji, A. Oliner. Guidance and leakage properties of offset groove guide. IEEE MTT-S International Microwave Symposium Digest, 731-734(1987).

[52] H. Shigesawa, M. Tsuji, P. Lampariello, F. Frezza, A. Oliner. Coupling between different leaky-mode types in stub-loaded leaky waveguides. IEEE Trans. Microw. Theory Tech., 42, 1548-1560(1994).

[53] Z. Ma, E. Yamashita. Wave leakage from groove NRD structures. IEEE Microw. Guid. Wave Lett., 3, 170-172(1993).

[54] P. Bienstman, S. Selleri, L. Rosa, H. P. Uranus, W. C. L. Hopman, R. Costa, A. Melloni, L. C. Andreani, J. P. Hugonin, P. Lalanne, D. Pinto, S. S. A. Obayya, M. Dems, K. Panajotov. Modelling leaky photonic wires: a mode solver comparison. Opt. Quantum Electron., 38, 731-759(2006).