[1] Armstrong J A, Bloembergen N, Ducuing J et al. Interactions between light waves in a nonlinear dielectric[J]. Physical Review, 127, 1918-1939(1962).

[2] Berger V. Nonlinear photonic crystals[J]. Physical Review Letters, 81, 4136-4139(1998).

[3] Chen J J, Chen X F. Phase matching in three-dimensional nonlinear photonic crystals[J]. Physical Review A, 80, 013801(2009).

[4] Yamada M, Nada N, Saitoh M et al. First-order quasi-phase matched LiNbO3 waveguide periodically poled by applying an external field for efficient blue second-harmonic generation[J]. Applied Physics Letters, 62, 435-436(1993).

[5] Sugioka K, Cheng Y. Ultrafast lasers: reliable tools for advanced materials processing[J]. Light: Science & Applications, 3, e149(2014).

[6] Franken P A, Ward J F. Optical harmonics and nonlinear phenomena[J]. Reviews of Modern Physics, 35, 23-39(1963).

[7] Fejer M M, Magel G A, Jundt D H et al. Quasi-phase-matched second harmonic generation: tuning and tolerances[J]. IEEE Journal of Quantum Electronics, 28, 2631-2654(1992).

[8] Ma B Q, Wang T[M]. Researches on nonlinear photonic crystals, 17-19(2013).

[9] Zhu S N, Zhu Y Y, Ming N B et al. Quasi-phase-matched third-harmonic generation in a quasi-periodic optical superlattice[J]. Science, 278, 843-846(1997).

[10] Zhu S N, Zhu Y Y, Qin Y Q et al. Experimental realization of second harmonic generation in a Fibonacci optical superlattice of LiTaO3[J]. Physical Review Letters, 78, 2752-2755(1997).

[11] Wang X H, Gu B Y. Nonlinear frequency conversion in 2D χ(2) photonic crystals and novel nonlinear double-circle construction[J]. The European Physical Journal B - Condensed Matter and Complex Systems, 24, 323-326(2001).

[12] Saltiel S M, Kivshar Y S. Phase matching in nonlinear χ(2) photonic crystals[J]. Optics Letters, 25, 1204-1206(2000).

[13] Saltiel S M, Kivshar Y S. All-optical deflection and splitting by second-order cascading[J]. Optics Letters, 27, 921-923(2002).

[14] Saltiel S m, Krolikowski W, Neshev D N et al. Generation of Bessel beams by parametric frequency doubling in annular nonlinear periodic structures[J]. Optics Express, 15, 4132-4138(2007).

[15] Saltiel S M, Neshev D N, Fischer R et al. Generation of second-harmonic conical waves via nonlinear Bragg diffraction[J]. Physical Review Letters, 100, 103902(2008).

[16] Arie A, PeriodicVoloch N. quasi-periodic, and random quadratic nonlinear photonic crystals[J]. Laser & Photonics Reviews, 4, 355-373(2010).

[17] Zhang J, Zhao X H, Zheng Y L et al. Universal modeling of second-order nonlinear frequency conversion in three-dimensional nonlinear photonic crystals[J]. Optics Express, 26, 15675-15682(2018).

[18] Pogosian T, Lai N D. Theoretical investigation of three-dimensional quasi-phase-matching photonic structures[J]. Physical Review A, 94, 063821(2016).

[19] Du J H, Song W, Zhang H J. Advances in three-dimensional quasi-phase matching[J]. Chinese Journal of Lasers, 48, 1208001(2021).

[20] Chen J J, Chen X F. Generation of conical and spherical second harmonics in three-dimensional nonlinear photonic crystals with radial symmetry[J]. Journal of the Optical Society of America B, 28, 241-246(2011).

[21] Feng D, Ming N B, Hong J F et al. Enhancement of second-harmonic generation in LiNbO3 crystals with periodic laminar ferroelectric domains[J]. Applied Physics Letters, 37, 607-609(1980).

[22] Wang W S, Zou Q, Geng Z H et al. Study of LiTaO3 crystals grown with a modulated structure I. Second harmonic generation in LiTaO3 crystals with periodic laminar ferroelectric domains[J]. Journal of Crystal Growth, 79, 706-709(1986).

[23] Lim E J, Fejer M M, Byer R L et al. Blue light generation by frequency doubling in periodically poled lithium niobate channel waveguide[J]. Electronics Letters, 25, 731-732(1989).

[24] Lim E J, Fejer M M, Byer R L. Second-harmonic generation of green light in periodically poled planar lithium niobate waveguide[J]. Electronics Letters, 25, 174-175(1989).

[25] Webjorn J, Laurell F, Arvidsson G. Blue light generated by frequency doubling of laser diode light in a lithium niobate channel waveguide[J]. IEEE Photonics Technology Letters, 1, 316-318(1989).

[26] Maruo S, Ikuta K, Korogi H. Submicron manipulation tools driven by light in a liquid[J]. Applied Physics Letters, 82, 133-135(2002).

[27] Wu D, Wu S Z, Niu L G et al. High numerical aperture microlens arrays of close packing[J]. Applied Physics Letters, 97, 031109(2010).

[28] Amato L, Gu Y, Bellini N et al. Integrated three-dimensional filter separates nanoscale from microscale elements in a microfluidic chip[J]. Lab on a Chip, 12, 1135-1142(2012).

[29] Narayan R, Goering P. Laser micro- and nanofabrication of biomaterials[J]. MRS Bulletin, 36, 973-982(2011).

[30] Fahy S, Merlin R. Reversal of ferroelectric domains by ultrashort optical pulses[J]. Physical Review Letters, 73, 1122-1125(1994).

[31] Zhu H S, Chen X F, Chen H Y et al. Formation of domain reversal by direct irradiation with femtosecond laser in lithium niobate[J]. Chinese Optics Letters, 7, 169-172(2009).

[32] Lao H Y, Zhu H S, Chen X F. Threshold fluence for domain reversal directly induced by femtosecond laser in lithium niobate[J]. Applied Physics A, 101, 313-317(2010).

[33] Chen X, Karpinski P, Shvedov V et al. Two-dimensional domain structures in lithium niobate via domain inversion with ultrafast light[J]. Photonics Letters of Poland, 8, 33-35(2016).

[34] Muir A C, Sones C L, Mailis S et al. Direct-writing of inverted domains in lithium niobate using a continuous wave ultra violet laser[J]. Optics Express, 16, 2336-2350(2008).

[35] Steigerwald H, Ying Y J, Eason R W et al. Direct writing of ferroelectric domains on the x- and y-faces of lithium niobate using a continuous wave ultraviolet laser[J]. Applied Physics Letters, 98, 062902(2011).

[36] Sones C L, Valdivia C E, Scott J G et al. Ultraviolet laser-induced sub-micron periodic domain formation in congruent undoped lithium niobate crystals[J]. Applied Physics B, 80, 341-344(2005).

[37] Imbrock J, Hanafi H, Ayoub M et al. Local domain inversion in MgO-doped lithium niobate by pyroelectric field-assisted femtosecond laser lithography[J]. Applied Physics Letters, 113, 252901(2018).

[38] Chen X, Karpinski P, Shvedov V et al. Ferroelectric domain engineering by focused infrared femtosecond pulses[J]. Applied Physics Letters, 107, 141102(2015).

[39] Liu S, Switkowski K, Chen X et al. Broadband enhancement of Čerenkov second harmonic generation in a sunflower spiral nonlinear photonic crystal[J]. Optics Express, 26, 8628-8633(2018).

[40] Zhang S G, Yao J H, Shi Q et al. Fabrication and characterization of periodically poled lithium niobate waveguide using femtosecond laser pulses[J]. Applied Physics Letters, 92, 231106(2008).

[41] Huang Z C, Tu C H, Zhang S G et al. Femtosecond second-harmonic generation in periodically poled lithium niobate waveguides written by femtosecond laser pulses[J]. Optics Letters, 35, 877-879(2010).

[42] Campbell S, Thomson R R, Hand D P et al. Frequency-doubling in femtosecond laser inscribed periodically-poled potassium titanyl phosphate waveguides[J]. Optics Express, 15, 17146-17150(2007).

[43] Zhang S G, Yao J H, Liu W W et al. Second harmonic generation of periodically poled potassium titanyl phosphate waveguide using femtosecond laser pulses[J]. Optics Express, 16, 14180-14185(2008).

[44] Wang L, Zhang X T, Li L Q et al. Second harmonic generation of femtosecond laser written depressed cladding waveguides in periodically poled MgO: LiTaO3 crystal[J]. Optics Express, 27, 2101-2111(2019).

[45] Triplett M, Khaydarov J, Xu X Z et al. Multi-watt, broadband second-harmonic-generation in MgO: PPSLT waveguides fabricated with femtosecond laser micromachining[J]. Optics Express, 27, 21102-21115(2019).

[46] Ding Y, Li Q, Li J Y et al. Application of ultrafast lasers in the manufacture of passive optical waveguide devices: a review[J]. Chinese Journal of Lasers, 48, 0802020(2021).

[47] Chen X, Karpinski P, Shvedov V et al. Quasi-phase matching via femtosecond laser-induced domain inversion in lithium niobate waveguides[J]. Optics Letters, 41, 2410-2413(2016).

[48] Xu T X, Switkowski K, Chen X et al. Three-dimensional nonlinear photonic crystal in ferroelectric Barium calcium titanate[J]. Nature Photonics, 12, 591-595(2018).

[49] Mazur L M, Liu S, Chen X et al. Localized ferroelectric domains via laser poling in monodomain calcium Barium niobate crystal[J]. Laser & Photonics Reviews, 15, 2100088(2021).

[50] Burghoff J, Hartung H, Nolte S et al. Structural properties of femtosecond laser-induced modifications in LiNbO3[J]. Applied Physics A, 86, 165-170(2007).

[51] Lee Y L, Yu N E, Jung C et al. Second-harmonic generation in periodically poled lithium niobate waveguides fabricated by femtosecond laser pulses[J]. Applied Physics Letters, 89, 171103(2006).

[52] Osellame R, Lobino M, Chiodo N et al. Femtosecond laser writing of waveguides in periodically poled lithium niobate preserving the nonlinear coefficient[J]. Applied Physics Letters, 90, 241107(2007).

[53] Deshpande D C, Malshe A P, Stach E A et al. Investigation of femtosecond laser assisted nano and microscale modifications in lithium niobate[J]. Journal of Applied Physics, 97, 074316(2005).

[54] Burghoff J, Nolte S, Tünnermann A. Origins of waveguiding in femtosecond laser-structured LiNbO3[J]. Applied Physics A, 89, 127-132(2007).

[55] Wei D Z, Wang C W, Wang H J et al. Experimental demonstration of a three-dimensional lithium niobate nonlinear photonic crystal[J]. Nature Photonics, 12, 596-600(2018).

[56] Thomas J, Hilbert V, Geiss R et al. Quasi phase matching in femtosecond pulse volume structured x-cut lithium niobate[J]. Laser & Photonics Reviews, 7, L17-L20(2013).

[57] Kroesen S, Tekce K, Imbrock J et al. Monolithic fabrication of quasi phase-matched waveguides by femtosecond laser structuring the χ(2) nonlinearity[J]. Applied Physics Letters, 107, 101109(2015).

[58] Imbrock J, Wesemann L, Kroesen S et al. Waveguide-integrated three-dimensional quasi-phase-matching structures[J]. Optica, 7, 28-34(2020).

[59] Zhu B, Liu H G, Chen Y P et al. High conversion efficiency second-harmonic beam shaping via amplitude-type nonlinear photonic crystals[J]. Optics Letters, 45, 220-223(2019).

[60] Liu D W, Liu S, Mazur L M et al. Smart optically induced nonlinear photonic crystals for frequency conversion and control[J]. Applied Physics Letters, 116, 051104(2020).

[61] Liu S, Switkowski K, Xu C L et al. Nonlinear wavefront shaping with optically induced three-dimensional nonlinear photonic crystals[J]. Nature Communications, 10, 3208(2019).

[62] Wei D Z, Wang C W, Xu X Y et al. Efficient nonlinear beam shaping in three-dimensional lithium niobate nonlinear photonic crystals[J]. Nature Communications, 10, 4193(2019).

[63] Liu S, Mazur L M, Królikowski W et al. Nonlinear volume holography in 3D nonlinear photonic crystals[J]. Laser & Photonics Review, 14, 2000224(2020).

[64] Wang B X, Hong X M, Wang K et al. Nonlinear detour phase holography[J]. Nanoscale, 13, 2693-2702(2021).

[65] Zhu B, Liu H G, Liu Y A et al. Second-harmonic computer-generated holographic imaging through monolithic lithium niobate crystal by femtosecond laser micromachining[J]. Optics Letters, 45, 4132-4135(2020).

[66] Chen P C, Wang C W, Wei D Z et al. Quasi-phase-matching-division multiplexing holography in a three-dimensional nonlinear photonic crystal[J]. Light: Science & Applications, 10, 146(2021).

[67] Halasyamani P S, Rondinelli J M. The must-have and nice-to-have experimental and computational requirements for functional frequency doubling deep-UV crystals[J]. Nature Communications, 9, 2972(2018).

[68] Zhao Z G, Xuan H W, Wang J C et al. Research progresses on vacuum-ultraviolet 193-nm band solid-state lasers[J]. Acta Optica Sinica, 42, 1134010(2022).

[69] Togashi T, Kanai T, Sekikawa T et al. Generation of vacuum-ultraviolet light by an optically contacted, prism-coupled KBe2BO3F2 crystal[J]. Optics Letters, 28, 254-256(2003).

[70] Dai S B, Chen M, Zhang S J et al. 2.14 mW deep-ultraviolet laser at 165 nm by eighth-harmonic generation of a 1319 nm Nd∶YAG laser in KBBF[J]. Laser Physics Letters, 13, 035401(2016).

[71] Shao M C, Liang F, Yu H H et al. Pushing periodic-disorder-induced phase matching into the deep-ultraviolet spectral region: theory and demonstration[J]. Light: Science & Applications, 9, 45(2020).

[72] Shao M C, Liang F, Yu H H et al. Angular engineering strategy of an additional periodic phase for widely tunable phase-matched deep-ultraviolet second harmonic generation[J]. Light: Science & Applications, 11, 31(2022).

[73] Jesacher A, Booth M J. Parallel direct laser writing in three dimensions with spatially dependent aberration correction[J]. Optics Express, 18, 21090-21099(2010).

[74] Cumming B P, Jesacher A, Booth M J et al. Adaptive aberration compensation for three-dimensional micro-fabrication of photonic crystals in lithium niobate[J]. Optics Express, 19, 9419-9425(2011).

[75] Sun W G, Ji L F, Zheng J C et al. High-aspect-ratio photonic-crystal structure of lithium niobate fabricated via femtosecond Bessel beam direct writing[J]. Chinese Journal of Lasers, 49, 1002503(2022).

[76] Ding K W, Wang C, Luo Z et al. Principle and method of ultrafast laser beam shaping and its application in functional microstructure fabrication[J]. Chinese Journal of Lasers, 48, 0202005(2021).