Chinese Optics, Volume. 16, Issue 3, 637(2023)
White light interferometry micro measurement algorithm based on principal component analysis
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Hao-bo CHEN, Li-wei ZHANG, Wen-qing SUN, Bao-hua CHEN, Zhao-liang CAO, Quan-ying WU. White light interferometry micro measurement algorithm based on principal component analysis[J]. Chinese Optics, 2023, 16(3): 637
Category: Original Article
Received: Jul. 26, 2022
Accepted: Sep. 9, 2022
Published Online: May. 31, 2023
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