Chinese Optics, Volume. 16, Issue 3, 637(2023)

White light interferometry micro measurement algorithm based on principal component analysis

Hao-bo CHEN1,2, Li-wei ZHANG1,2, Wen-qing SUN1,2、*, Bao-hua CHEN1,2, Zhao-liang CAO1,2, and Quan-ying WU1,2
Author Affiliations
  • 1School of Physical Science and Technology, Suzhou University of Science and Technology, Suzhou 215009, China
  • 2Jiangsu Key Laboratory of Micro and Nano Heat Fluid Flow Technology and Energy Application, Suzhou 215009, China
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    References(19)

    [2] [2] LEACH R. Optical Measurement of Surface Topography[M]. Berlin: Springer, 2011.

    [4] LIANG Z J, YANG Y Y, ZHAO H Y, . Advances in research and applications of optical aspheric surface metrology[J]. Chinese Opticals, 15, 161-186(2022).

    [7] [7] SCHMIT J, CREATH K, WYANT J C. Surface Profilers, Multiple Wavelength, White Light Intereferometry[M]MALACARA D. Optical Shop Testing. 3rd ed. Hoboken: John Wiley & Sons, Inc. , 2006: 667755.

    [8] [8] MA L. Study on white light scanning interferometry: measurement method system[D]. Tianjin: Tianjin University, 2011. (in Chinese)

    [9] SANDOZ P. An algorithm for profilometry by white-light phase-shifting interferometry[J]. Journal of Modern Optics, 43, 1545-1554(1996).

    [14] [14] JIA J. Research on white light phaseshifting algithm f white light profiler[D]. Tianjin: Civil Aviation University of China, 2020. (in Chinese)

    [17] ZHANG CH, YUAN Q, ZHANG J L, . Calibration method of the phase-shifting error for the topography measurement utilizing white light interferometric microscopy[J]. Infrared and Laser Engineering, 51, 20220050(2022).

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    Hao-bo CHEN, Li-wei ZHANG, Wen-qing SUN, Bao-hua CHEN, Zhao-liang CAO, Quan-ying WU. White light interferometry micro measurement algorithm based on principal component analysis[J]. Chinese Optics, 2023, 16(3): 637

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    Paper Information

    Category: Original Article

    Received: Jul. 26, 2022

    Accepted: Sep. 9, 2022

    Published Online: May. 31, 2023

    The Author Email:

    DOI:10.37188/CO.2022-0172

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