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Opto-Electronic Engineering, Volume. 46, Issue 8, 180516(2019)

Oblique incidence dynamic phase-shifting interferometer based on inclination angle deflection

Liu Zhiyuan1、*, Chen Lei1, Zhu Wenhua1, Ding Yu1, Ma Yun2, and Zheng Donghui1
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    Liu Zhiyuan, Chen Lei, Zhu Wenhua, Ding Yu, Ma Yun, Zheng Donghui. Oblique incidence dynamic phase-shifting interferometer based on inclination angle deflection[J]. Opto-Electronic Engineering, 2019, 46(8): 180516

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    Paper Information

    Category: Article

    Received: Oct. 9, 2018

    Accepted: --

    Published Online: Sep. 28, 2019

    The Author Email: Zhiyuan Liu (liuzhiyuan@njust.edu.cn)

    DOI:10.12086/oee.2019.180516

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology