Fig. 1. EM model of planar Schottky diode

Fig. 2. Model of diode without air bridge: (a) EM model；(b) equivalent circuit model

Fig. 3. Equivalent circuit model and EM model simulation results of diode structure without air bridge

Fig. 4. Model of diode with short circuit structure：(a) EM model；(b) equivalent circuit model

Fig. 5. Equivalent circuit model and EM model simulation results of diode with short circuit structure

Fig. 6. Model of diode with open circuit structure：(a) EM model；(b) equivalent circuit model

Fig. 7. Equivalent circuit model and EM model simulation results of diode with open circuit structure

Fig. 8. Schottky diode three-dimensional structure and equivalent circuit model: (a) EM model; (b) equivalent circuit model

Fig. 9. Schottky diode DC and capacitance simulation and test comparison curve

Fig. 10. (a) Diagram of balanced frequency tripler structure；(b) layout design

Fig. 11. Frequency tripler simulation results：(a) VSWR；(b) conversion gain

Fig. 12. Photograph of chip

Fig. 13. Diagram of the test system

Fig. 14. On-chip test curve：(a) VSWR；(b) conversion gain