Chinese Optics Letters, Volume. 20, Issue 11, 111301(2022)
Fabrication and characterization of on-chip silicon spherical-like microcavities with high Q-factors
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Fig. 2. SEM images of our prepared sample. (a) Side view before laser illumination, (b) and (c) side view and top view after laser illumination, and (d) zoom-in view of the edge after laser illumination.
Fig. 3. AFM image of the fabricated silicon spherical microcavity.
Fig. 4. (a) Transmission spectrum of the microcavity coupled with the fiber taper from 1515 to 1525 nm; (b) the Lorentzian fit (solid red line) of the measured spectrum around the resonant wavelength at 1519.6 nm (solid black line), showing a Q-factor of 3.5 × 105.
Table 1. Main Parameters of Bosch Processes
View tableView in ArticleTable 1. Main Parameters of Bosch Processes
1st Bosch Process 2nd Bosch Process Passivation time/cycle Etching time/cycle Passivation time/cycle Etching time/cycle 0.8 s 1.7 s 7 s 24.5 s Number of cycles: 60 Number of cycles: 1
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Hailong Han, Hao Li, Lixing You, Xiaoping Liu, "Fabrication and characterization of on-chip silicon spherical-like microcavities with high Q-factors," Chin. Opt. Lett. 20, 111301 (2022)
Paper Information
Category: Integrated Optics
Received: Apr. 13, 2022
Accepted: Jun. 6, 2022
Published Online: Jul. 14, 2022
The Author Email: Xiaoping Liu (liuxp1@shanghaitech.edu.cn)
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