Optoelectronic Technology, Volume. 40, Issue 4, 291(2020)

Step Grating for Holographic Waveguide System

Ye YUAN1, Qibin FENG2, and Guoqiang LYU3
Author Affiliations
  • 1AVIC Hua Dong Photoelectric Co. , Ltd. , Wuhu Anhui, 24002, CHN
  • 2Academy of Photoelectric Technology, Hefei University of Technology, Hefei 30009, CHN
  • 3School of Instrumentation and Opto⁃electronics Engineering, Hefei University of Technology, Hefei 20009, CHN
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    Figures & Tables(9)
    Schematic of three-step grating
    Simulation modeling of three-step grating
    Simulation results with different refractive indexes
    Flow chart of maskless lithography
    Test result of three-step grating
    Test system of three-step grating
    Practical holographic waveguide system with three-step gratings
    • Table 1. AZ4562曝光强度和光栅高度的关系

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      Table 1. AZ4562曝光强度和光栅高度的关系

      曝光强度/(mJ·cm-2光栅高度/nm
      40/
      60540
      80890
      1001 190
      1201 650
      1402 670
    • Table 2. 光栅衍射效率测试结果

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      Table 2. 光栅衍射效率测试结果

      衍射级次-101所有级次
      探测电压 / mV53.87.822.1108.2
      衍射效率η / (%)49.77.220.4
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    Ye YUAN, Qibin FENG, Guoqiang LYU. Step Grating for Holographic Waveguide System[J]. Optoelectronic Technology, 2020, 40(4): 291

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    Paper Information

    Category: Research and Trial-manufacture

    Received: Jun. 28, 2020

    Accepted: --

    Published Online: Jan. 12, 2021

    The Author Email:

    DOI:10.19453/j.cnki.1005-488x.2020.04.009

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