Researching | Film-Thickness Measurement Method Combining Frequency-Domain White-Light Interference and Reflection Spectroscopy

Laser & Optoelectronics Progress, Volume. 62, Issue 3, 0312004(2025)

Film-Thickness Measurement Method Combining Frequency-Domain White-Light Interference and Reflection Spectroscopy

Ruibo Gao^1、*, Hansheng Ye^1,3, Wei Fan¹, Lai Wei¹, and Yuqiu Gu^1,2

Author Affiliations

¹Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, Sichuan , China

²Mianyang Sci-Tech City Institute of Photon Technology, Mianyang 621025, Sichuan ,China

³Department of Engineering Physics, Tsinghua University, Beijing 100084, China

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References(19)

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Ruibo Gao, Hansheng Ye, Wei Fan, Lai Wei, Yuqiu Gu. Film-Thickness Measurement Method Combining Frequency-Domain White-Light Interference and Reflection Spectroscopy[J]. Laser & Optoelectronics Progress, 2025, 62(3): 0312004

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Apr. 23, 2024

Accepted: May. 28, 2024

Published Online: Feb. 18, 2025

The Author Email:

DOI:10.3788/LOP241352

CSTR:32186.14.LOP241352

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology