Laser & Optoelectronics Progress, Volume. 62, Issue 3, 0312004(2025)

Film-Thickness Measurement Method Combining Frequency-Domain White-Light Interference and Reflection Spectroscopy

Ruibo Gao1、*, Hansheng Ye1,3, Wei Fan1, Lai Wei1, and Yuqiu Gu1,2
Author Affiliations
  • 1Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, Sichuan , China
  • 2Mianyang Sci-Tech City Institute of Photon Technology, Mianyang 621025, Sichuan ,China
  • 3Department of Engineering Physics, Tsinghua University, Beijing 100084, China
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    This paper proposes a new method for measuring film thickness that combines frequency-domain white-light interference and reflection spectroscopy. In addition to the film to be measured, this method considers air as a medium layer to construct a multilayer-film-structure model. The nonlinear phase is reconstructed using white-light frequency-domain interference fringes generated by the reflection of the multilayer film structure, and the film thickness is obtained via fitting. To solve the local optimal solution problem that occurs during fitting, the thickness obtained via reflection spectroscopy is used to limit the fitting range. In this study, theoretical derivation and numerical simulation are performed to examine the process of measuring the thickness of the film to be measured using a multilayer-film-structure model. Subsequently, a fiber-optic measuring system is constructed to verify the feasibility of this method by experimentally measuring the thickness of a single-layer silica film.

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    Ruibo Gao, Hansheng Ye, Wei Fan, Lai Wei, Yuqiu Gu. Film-Thickness Measurement Method Combining Frequency-Domain White-Light Interference and Reflection Spectroscopy[J]. Laser & Optoelectronics Progress, 2025, 62(3): 0312004

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Apr. 23, 2024

    Accepted: May. 28, 2024

    Published Online: Feb. 18, 2025

    The Author Email:

    DOI:10.3788/LOP241352

    CSTR:32186.14.LOP241352

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