Chinese Journal of Lasers, Volume. 51, Issue 16, 1602406(2024)
Fabrication of Ag Micro‑dots with Laser Interference Induced Forward Transfer Technology and Their SERS Property
Fig. 2. Schematic of three-beam LIIFT Ag micro-dot. (a) Optical path diagram of three-beam LIIFT; (b) schematic of three-beam LIIFT process; (c) SEM image of transferred Ag micro-dot array
Fig. 3. SEM images of Ag micro-dot array structures transferred by LIIFT technology and statistical distribution results of Ag nanoparticles in single Ag micro-dot. (a1)‒(a3) SEM images of Ag micro-dot array structures transferred by LIIFT technology; (b1)‒(b3) magnification images of single micro-dots; (c1)‒(c3) statistical results of nanoparticle distributions in central regions (elliptic part) of single micro-dots in Figs. 3(b1)~(b3)
Fig. 4. Relationship between distribution of nanoparticles in Ag micro-dot structure and dot array period
Fig. 5. Three-beam interference simulation diagrams under TM-TM-TM mode. (a)‒(c) Interference patterns; (d)‒(f) interference light intensity distributions
Fig. 6. EDS analysis of transferred micro-dots. (a) SEM image of transferred micro-dots; (b) elemental analysis spectrum of transferred micro-dots; (c) surface distribution diagram of Si element in transferred micro-dot structure; (d) surface distribution diagram of Ag element in transferred micro-dot structure
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Huijuan Shen, Zhankun Weng, Changli Li, Liqiang Deng, Taikun Han. Fabrication of Ag Micro‑dots with Laser Interference Induced Forward Transfer Technology and Their SERS Property[J]. Chinese Journal of Lasers, 2024, 51(16): 1602406
Category: Laser Micro-Nano Manufacturing
Received: Aug. 1, 2023
Accepted: Oct. 9, 2023
Published Online: Apr. 17, 2024
The Author Email: Li Changli (lcl-cust@126.com)
CSTR:32183.14.CJL231081