Chinese Journal of Lasers, Volume. 51, Issue 16, 1602406(2024)

Fabrication of Ag Micro‑dots with Laser Interference Induced Forward Transfer Technology and Their SERS Property

Huijuan Shen1, Zhankun Weng2, Changli Li3、*, Liqiang Deng1, and Taikun Han1
Author Affiliations
  • 1School of Science, Guangdong University of Petrochemical Technology, Maoming 525000, Guangdong, China
  • 2School of Mechatronic Engineering and Automation, Foshan University, Foshan 528225, Guangdong, China
  • 3School of Science, Changchun University of Science and Technology, Changchun 130022, Jilin, China
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    Figures & Tables(8)
    Preparation process diagram of donor film substrate
    Schematic of three-beam LIIFT Ag micro-dot. (a) Optical path diagram of three-beam LIIFT; (b) schematic of three-beam LIIFT process; (c) SEM image of transferred Ag micro-dot array
    SEM images of Ag micro-dot array structures transferred by LIIFT technology and statistical distribution results of Ag nanoparticles in single Ag micro-dot. (a1)‒(a3) SEM images of Ag micro-dot array structures transferred by LIIFT technology; (b1)‒(b3) magnification images of single micro-dots; (c1)‒(c3) statistical results of nanoparticle distributions in central regions (elliptic part) of single micro-dots in Figs. 3(b1)~(b3)
    Relationship between distribution of nanoparticles in Ag micro-dot structure and dot array period
    Three-beam interference simulation diagrams under TM-TM-TM mode. (a)‒(c) Interference patterns; (d)‒(f) interference light intensity distributions
    EDS analysis of transferred micro-dots. (a) SEM image of transferred micro-dots; (b) elemental analysis spectrum of transferred micro-dots; (c) surface distribution diagram of Si element in transferred micro-dot structure; (d) surface distribution diagram of Ag element in transferred micro-dot structure
    Raman spectra of RhB on Ag micro-dot substrates with different periods
    • Table 1. Components in micro-dots

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      Table 1. Components in micro-dots

      ElementSiAg
      Mass fraction /%99.140.86
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    Huijuan Shen, Zhankun Weng, Changli Li, Liqiang Deng, Taikun Han. Fabrication of Ag Micro‑dots with Laser Interference Induced Forward Transfer Technology and Their SERS Property[J]. Chinese Journal of Lasers, 2024, 51(16): 1602406

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    Paper Information

    Category: Laser Micro-Nano Manufacturing

    Received: Aug. 1, 2023

    Accepted: Oct. 9, 2023

    Published Online: Apr. 17, 2024

    The Author Email: Li Changli (lcl-cust@126.com)

    DOI:10.3788/CJL231081

    CSTR:32183.14.CJL231081

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