Fig. 1. Beam pointing control by FSMs

Fig. 2. A butterfly flexure hinge

Fig. 3. Beam pointing accuracy effect analysis

Fig. 4. Pivot structure design

Fig. 5. Structure of an FSM system

Fig. 6. Sectional view and flexural strain schematic diagram of the universal flexure hinge

Fig. 7. Exploded view of flexure hinge units

Fig. 8. Simplified structure diagram of in-plane butterfly flexure hinge units

Fig. 9. Stress diagram of the parallel flexible structure fixed support

Fig. 10. Topology optimization result of right quadrant

Fig. 11. Topology optimization result of right quadrant

Fig. 12. Photograph of a bi-axial half-butterfly flexure hinge

Fig. 13. Simulation results of modals

Fig. 14. Photograph of the test system

Fig. 15. Open loop amplitude frequency response curve of Z axis