Introduction of Ag nanoparticles by picosecond LIFT to improve the photoelectric property of AZO films

Fig. 1. Relationship between the lattice temperature of the Ag film and the picosecond laser energy density, wherein the thickness of the Ag film is (a) 30 nm, (b) 50 nm, (c) 100 nm, and (d) 200 nm.

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Fig. 2. Schematic diagram of the picosecond LIFT system.

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Fig. 3. Schematic diagram of laser scanning transfer processing. (a) Scanning pitch $d = 2 r = 30 μ m$ . (b) Scanning pitch $d = r = 15 μ m$ .

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Fig. 4. Micro-morphology of AZO thin film after the transfer of 50 nm Ag film under parameters $E = 0.79 {J / cm}^{2}$ , $v = 25 mm / s$ : (a) 110 times, (b) 1000 times, (c) 5000 times, and (d) 17,000 times.

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Fig. 5. Sectional view of Ag-AZO films after the transfer of 50 nm Ag film under parameters $E = 0.79 {J / cm}^{2}$ , $v = 25 mm / s$ .

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Fig. 6. (a) Micro-morphology of AZO film after the transfer of a 30 nm Ag film under parameters $E = 0.32 {J / cm}^{2}$ , $v = 15 mm / s$ ; (b) micro-morphology of AZO thin film after the transfer of a 50 nm Ag film under parameters $E = 0.79 {J / cm}^{2}$ , $v = 25 mm / s$ .

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Fig. 7. (a) AFM diagram of initial AZO film; (b) AFM diagram of 30 nm Ag-AZO film.

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Fig. 8. (a) Light transmittance curves of the AZO film samples after the transfer of 50 nm Ag films; (b) light transmittance curves of the AZO film samples after the transfer of 30 nm Ag films.

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Table 1. Experimental Parameters and Transmittance, Sheet Resistance, and Quality Factor of 50 nm Ag Film Transfer Sample

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Table 1. Experimental Parameters and Transmittance, Sheet Resistance, and Quality Factor of 50 nm Ag Film Transfer Sample

Number	Laser Parameter		$T_{av}$ (%)	$R_{s} (Ω / sq)$	$F_{TC} (\times 10^{- 2} Ω^{- 1})$
Number	$E (J / {cm}^{2})$	V (mm/s)	$T_{av}$ (%)	$R_{s} (Ω / sq)$	$F_{TC} (\times 10^{- 2} Ω^{- 1})$
0	/	/	79.78	9.19	8.68
1	0.22	15	65.48	8.60	7.61
2	0.32	20	61.92	8.14	7.60
3	0.48	20	61.51	7.97	7.76
4	0.50	20	60.80	7.91	7.68
5	0.65	20	70.12	7.89	8.88
6	0.79	25	75.43	7.87	9.58
7	1.98	20	58.39	20.28	2.88

Table 2. Experimental Parameters and Transmittance, Sheet Resistance, and Quality Factor of 30 nm Ag Film Transfer Sample

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Table 2. Experimental Parameters and Transmittance, Sheet Resistance, and Quality Factor of 30 nm Ag Film Transfer Sample

Number	Laser Parameter		$T_{av}$ (%)	$R_{s} (Ω / sq)$	$F_{TC} (\times 10^{- 2} Ω^{- 1})$
Number	$E (J / {cm}^{2})$	V (mm/s)	$T_{av}$ (%)	$R_{s} (Ω / sq)$	$F_{TC} (\times 10^{- 2} Ω^{- 1})$
0	/	/	78.03	9.11	8.56
1	0.15	15	74.48	8.45	8.81
2	0.22	15	71.64	8.42	8.51
3	0.22	15	74.69	7.93	9.41
4	0.32	15	68.32	7.91	8.63
5	0.32	15	69.18	8.10	8.54
6	0.41	15	70.63	8.01	8.82
7	0.41	15	69.19	7.85	8.81

Table 3. Surface Roughness of AZO Film after 30 nm Ag Film Transfer
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Table 3. Surface Roughness of AZO Film after 30 nm Ag Film Transfer
Number 0 1 2 3
Roughness (nm) 3.649 17.596 20.367 21.485

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Xiaofang Xu, Jingbo Li, Xiaohan Yang, Sen Pan, Yong Bi, "Introduction of Ag nanoparticles by picosecond LIFT to improve the photoelectric property of AZO films," Chin. Opt. Lett. 18, 043101 (2020)

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Paper Information

Category: Thin Films and Optics at Surfaces

Received: Oct. 12, 2019

Accepted: Dec. 19, 2019

Posted: Dec. 19, 2019

Published Online: Apr. 10, 2020

The Author Email: Xiaofang Xu (xiaofangxu@aliyun.com), Jingbo Li (814687954@qq.com)

DOI:10.3788/COL202018.043101

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. Experimental Parameters and Transmittance, Sheet Resistance, and Quality Factor of 50 nm Ag Film Transfer Sample

Table 1. Experimental Parameters and Transmittance, Sheet Resistance, and Quality Factor of 50 nm Ag Film Transfer Sample

Table 2. Experimental Parameters and Transmittance, Sheet Resistance, and Quality Factor of 30 nm Ag Film Transfer Sample

Table 2. Experimental Parameters and Transmittance, Sheet Resistance, and Quality Factor of 30 nm Ag Film Transfer Sample

Table 3. Surface Roughness of AZO Film after 30 nm Ag Film Transfer

Table 3. Surface Roughness of AZO Film after 30 nm Ag Film Transfer