Acta Optica Sinica, Volume. 18, Issue 10, 1445(1998)
The Relationship Between Silicon Micromechanical Resonators and Excited Point
References(3)
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[2] [2] M. Hoffmann, H. Bezzaoui, E. Voges. Micromechanical cantilever resonators with integrated optical interrogation. Sensors and Actuators (A), 1994, 44: 71～75
[3] [3] Rebwar M. A. Fatah. Mechanisms of optical activation of micromechanical resonators. Sensors and Actuators (A), 1992, 33: 229～236
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. The Relationship Between Silicon Micromechanical Resonators and Excited Point[J]. Acta Optica Sinica, 1998, 18(10): 1445
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